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Etching of silicon oxide film
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Patent number 9,105,586
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Issue date Aug 11, 2015
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Tokyo Electron Limited
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Shigeki Tozawa
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H01 - BASIC ELECTRIC ELEMENTS
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Magnetron plasma processing apparatus
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Patent number 6,190,495
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Issue date Feb 20, 2001
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Tokyo Electron Limited
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Kazuhiro Kubota
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
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Patent number 5,779,803
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Issue date Jul 14, 1998
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Tokyo Electron Limited
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Yoichi Kurono
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma etching system
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Patent number 5,423,936
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Issue date Jun 13, 1995
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Hitachi, Ltd.
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Kazushi Tomita
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H01 - BASIC ELECTRIC ELEMENTS