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Shigeki Wada
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Koshi-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of controlling substrate processing apparatus and substrate...
Patent number
7,529,595
Issue date
May 5, 2009
Tokyo Electron Limited
Shinichi Shinozuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing schedule creating method, coating and developing apparat...
Patent number
7,449,349
Issue date
Nov 11, 2008
Tokyo Electron Limited
Shigeki Wada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inline connection setting method and device and substrate processin...
Patent number
7,167,769
Issue date
Jan 23, 2007
Tokyo Electron Limited
Shigeki Wada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate transferring method
Patent number
6,981,808
Issue date
Jan 3, 2006
Tokyo Electron Limited
Akira Miyata
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
Method of controlling substrate processing apparatus and substrate...
Publication number
20070088450
Publication date
Apr 19, 2007
Shinichi Shinozuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Processing schedule creaitng method, coating and developing apparat...
Publication number
20070004052
Publication date
Jan 4, 2007
TOKYO ELECTRON LIMITED
Shigeki Wada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inline connection setting method and device and substrate processin...
Publication number
20060079985
Publication date
Apr 13, 2006
Shigeki Wada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus and substrate transferring method
Publication number
20030147643
Publication date
Aug 7, 2003
TOKYO ELECTRON LIMITED
Akira Miyata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY