Shigemi Murakawa

Person

Sakura-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Microwave plasma processing apparatus, dielectric window for use in...
- Patent number 8,573,151
- Issue date Nov 5, 2013
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming method and forming system for insulation film
- Patent number 7,374,635
- Issue date May 20, 2008
- Tokyo Electron Limited
- Shigemi Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for producing materials for electronic device
- Patent number 7,217,659
- Issue date May 15, 2007
- Tokyo Electron Limited
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming system for insulation film
- Patent number 7,166,185
- Issue date Jan 23, 2007
- Tokyo Electron Limited
- Shigemi Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing electronic device material
- Patent number 6,897,149
- Issue date May 24, 2005
- Tokyo Electron Limited
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 6,470,824
- Issue date Oct 29, 2002
- Tokyo Electron Limited
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing method and semiconductor manufacturing...
- Patent number 6,399,520
- Issue date Jun 4, 2002
- Tokyo Electron Limited
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF SOLAR CELL AND MANUFACTURING APPARATUS OF S...
- Publication number 20100029038
- Publication date Feb 4, 2010
- TOKYO ELECTRON LIMITED
- Shigemi Murakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS, DIELECTRIC WINDOW FOR USE IN...
- Publication number 20090218044
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Tadahiro OHMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Forming Method and Forming System for Insulation Film
- Publication number 20080214017
- Publication date Sep 4, 2008
- TOKYO ELECTRON LIMITED
- Shigemi Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing material of electronic device
- Publication number 20070224837
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing materials for electronic device
- Publication number 20070218687
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Forming method and forming system for insulation film
- Publication number 20070085154
- Publication date Apr 19, 2007
- TOKYO ELECTRON LIMITED
- Shigemi Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing material of electronic device
- Publication number 20050233599
- Publication date Oct 20, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing materials for electronic device
- Publication number 20050176263
- Publication date Aug 11, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device and production method therefor
- Publication number 20050003660
- Publication date Jan 6, 2005
- Shigemi Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Forming method and forming system for insulation film
- Publication number 20040245584
- Publication date Dec 9, 2004
- Shigemi Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Production method and production device for semiconductor device
- Publication number 20040241968
- Publication date Dec 2, 2004
- Shigemi Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing material of electronic device
- Publication number 20040142577
- Publication date Jul 22, 2004
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of producing electronic device material
- Publication number 20040048452
- Publication date Mar 11, 2004
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor manufacturing apparatus
- Publication number 20020111000
- Publication date Aug 15, 2002
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS

Shigemi Murakawa

Person

Patents Grantslast 30 patents

Microwave plasma processing apparatus, dielectric window for use in...

Forming method and forming system for insulation film

Process for producing materials for electronic device

Forming system for insulation film

Method of producing electronic device material

Semiconductor manufacturing apparatus

Semiconductor manufacturing method and semiconductor manufacturing...

Patents Applicationslast 30 patents

MANUFACTURING METHOD OF SOLAR CELL AND MANUFACTURING APPARATUS OF S...

MICROWAVE PLASMA PROCESSING APPARATUS, DIELECTRIC WINDOW FOR USE IN...

Forming Method and Forming System for Insulation Film

Method for producing material of electronic device

Process for producing materials for electronic device

Forming method and forming system for insulation film

Method for producing material of electronic device

Process for producing materials for electronic device

Semiconductor device and production method therefor

Forming method and forming system for insulation film

Production method and production device for semiconductor device

Method for producing material of electronic device

Method of producing electronic device material

Semiconductor manufacturing apparatus