Shigemi Oono

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Monitoring system for a sealing apparatus having a substrate treatm...
- Patent number 12,243,758
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- Shota Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,799,540
- Issue date Oct 24, 2017
- Tokyo Electron Limited
- Shigemi Oono
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MONITORING SYSTEM
- Publication number 20210143033
- Publication date May 13, 2021
- TOKYO ELECTRON LIMITED
- Shota KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20130206726
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Shigemi Oono
- H01 - BASIC ELECTRIC ELEMENTS