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Shigenobu Akiyama
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Hirakata, JP
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last 30 patents
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Patent Grant
Three-dimensional stacked LSI
Patent number
5,191,405
Issue date
Mar 2, 1993
Matsushita Electric Industrial Co., Ltd.
Yasuhiro Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a multilayer semiconductor device
Patent number
4,596,604
Issue date
Jun 24, 1986
Agency of Industrial Science and Technology
Shigenobu Akiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a multi-layer type semiconductor device inclu...
Patent number
4,487,635
Issue date
Dec 11, 1984
Director-General of the Agency of Industrial Science and Technology
Koichi Kugimiya
H01 - BASIC ELECTRIC ELEMENTS