Shigenobu Maruyama

Person

Oiso, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspecting method and defect inspecting apparatus
- Patent number 10,254,235
- Issue date Apr 9, 2019
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting method and defect inspecting apparatus
- Patent number 9,841,384
- Issue date Dec 12, 2017
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspecting method and defect inspecting apparatus
- Patent number 9,228,960
- Issue date Jan 5, 2016
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 9,041,921
- Issue date May 26, 2015
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Grant
Fault inspection device and fault inspection method
- Patent number 8,804,110
- Issue date Aug 12, 2014
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting method and inspecting apparatus for substrate surface
- Patent number 8,654,350
- Issue date Feb 18, 2014
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting method and defect inspecting apparatus
- Patent number 8,638,429
- Issue date Jan 28, 2014
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection device and inspection method
- Patent number 8,599,369
- Issue date Dec 3, 2013
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Flaw inspecting method and device therefor
- Patent number 8,514,388
- Issue date Aug 20, 2013
- Hitachi High-Technologies Corporation
- Shigenobu Maruyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting method and inspecting apparatus for substrate surface
- Patent number 8,310,665
- Issue date Nov 13, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting method and inspecting apparatus for substrate surface
- Patent number 8,144,337
- Issue date Mar 27, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope
- Patent number 7,498,589
- Issue date Mar 3, 2009
- Hitachi Kenki Fine Tech Co., Ltd.
- Shigenobu Maruyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
- Publication number 20180067060
- Publication date Mar 8, 2018
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
- Publication number 20160116421
- Publication date Apr 28, 2016
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspecting Method and Defect Inspecting Apparatus
- Publication number 20140125980
- Publication date May 8, 2014
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Application
FAULT INSPECTION DEVICE AND FAULT INSPECTION METHOD
- Publication number 20130141715
- Publication date Jun 6, 2013
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Application
Inspecting Method and Inspecting Apparatus For Substrate Surface
- Publication number 20130107247
- Publication date May 2, 2013
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
- Publication number 20130003052
- Publication date Jan 3, 2013
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Application
FLAW INSPECTING METHOD AND DEVICE THEREFOR
- Publication number 20120194807
- Publication date Aug 2, 2012
- Shigenobu Maruyama
- G01 - MEASURING TESTING
Information Patent Application
Inspecting Method and Inspecting Apparatus for Substrate Surface
- Publication number 20120162665
- Publication date Jun 28, 2012
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20120133928
- Publication date May 31, 2012
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Method and Defect Inspection Apparatus
- Publication number 20120092656
- Publication date Apr 19, 2012
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
- Publication number 20120019835
- Publication date Jan 26, 2012
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Application
Inspecting Method and Inspecting Apparatus for Substrate Surface
- Publication number 20090290168
- Publication date Nov 26, 2009
- Akira HAMAMATSU
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for determining surface profiles using a scann...
- Publication number 20060097162
- Publication date May 11, 2006
- Shigenobu Maruyama
- G01 - MEASURING TESTING

Shigenobu Maruyama

Person

Patents Grantslast 30 patents

Defect inspecting method and defect inspecting apparatus

Defect inspecting method and defect inspecting apparatus

Defect inspecting method and defect inspecting apparatus

Defect inspection device and defect inspection method

Fault inspection device and fault inspection method

Inspecting method and inspecting apparatus for substrate surface

Defect inspecting method and defect inspecting apparatus

Defect inspection device and inspection method

Flaw inspecting method and device therefor

Inspecting method and inspecting apparatus for substrate surface

Inspecting method and inspecting apparatus for substrate surface

Scanning probe microscope

Patents Applicationslast 30 patents

DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS

DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS

Defect Inspecting Method and Defect Inspecting Apparatus

FAULT INSPECTION DEVICE AND FAULT INSPECTION METHOD

Inspecting Method and Inspecting Apparatus For Substrate Surface

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

FLAW INSPECTING METHOD AND DEVICE THEREFOR

Inspecting Method and Inspecting Apparatus for Substrate Surface

DEFECT INSPECTION DEVICE AND INSPECTION METHOD

Defect Inspection Method and Defect Inspection Apparatus

DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS

Inspecting Method and Inspecting Apparatus for Substrate Surface

Apparatus and method for determining surface profiles using a scann...