Shigenobu Yokoshima

Follow

Person

Ohta-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Microwave applicator, plasma processing apparatus having same, and...
- Patent number 6,870,123
- Issue date Mar 22, 2005
- Canon Kabushiki Kaisha
- Nobumasa Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus having circular waveguide, and plasma p...
- Patent number 6,652,709
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Nobumasa Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing residue of ion implanted photoresist, and meth...
- Patent number 6,417,080
- Issue date Jul 9, 2002
- Canon Kabushiki Kaisha
- Shigenobu Yokoshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus and method
- Publication number 20050029954
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Shigenobu Yokoshima
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Microwave applicator, plasma processing apparatus having the same,...
- Publication number 20010054605
- Publication date Dec 27, 2001
- Nobumasa Suzuki
- H01 - BASIC ELECTRIC ELEMENTS