TREA

Shigenori Ishihara

Follow

Person

  • Yokohama-shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering apparatus and substrate processing apparatus
    • Patent number 10,615,012
    • Issue date Apr 7, 2020
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus and substrate processing apparatus
    • Patent number 10,062,551
    • Issue date Aug 28, 2018
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus and substrate processing apparatus
    • Patent number 9,997,339
    • Issue date Jun 12, 2018
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 9,966,241
    • Issue date May 8, 2018
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 9,627,187
    • Issue date Apr 18, 2017
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus, target and shield
    • Patent number 9,502,223
    • Issue date Nov 22, 2016
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 9,175,377
    • Issue date Nov 3, 2015
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus of plasma treatment
    • Patent number 8,298,627
    • Issue date Oct 30, 2012
    • Canon Anelva Corporation
    • Takashi Minami
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20180261440
    • Publication date Sep 13, 2018
    • Canon ANELVA Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20160027623
    • Publication date Jan 28, 2016
    • Canon ANELVA Corporation
    • Shigenori ISHIHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150262796
    • Publication date Sep 17, 2015
    • Canon ANELVA Corporation
    • Shigenori ISHIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150262797
    • Publication date Sep 17, 2015
    • Canon ANELVA Corporation
    • Shigenori ISHIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FASTENING MEMBER AND VACUUM DEVICE
    • Publication number 20150034481
    • Publication date Feb 5, 2015
    • Canon ANELVA Corporation
    • Shigenori ISHIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20140374250
    • Publication date Dec 25, 2014
    • Shigenori ISHIHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS, TARGET AND SHIELD
    • Publication number 20140284210
    • Publication date Sep 25, 2014
    • Canon ANELVA Corporation
    • Shigenori ISHIHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20120031748
    • Publication date Feb 9, 2012
    • Canon ANELVA Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS OF PLASMA TREATMENT
    • Publication number 20110124200
    • Publication date May 26, 2011
    • Canon ANELVA Corporation
    • Takashi Minami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND APPARATUS OF PLASMA TREATMENT
    • Publication number 20100260947
    • Publication date Oct 14, 2010
    • Canon ANELVA Corporation
    • Takashi Minami
    • H01 - BASIC ELECTRIC ELEMENTS