Shigeo Ashigaki

Person

Sagamihara City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma process device and plasma process method
- Patent number 8,394,231
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,897,498
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Glenn Gale
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of integrating metal-containing films into semiconductor dev...
- Patent number 7,674,710
- Issue date Mar 9, 2010
- Tokyo Electron Limited
- Shigeo Ashigaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Manufacturing Semiconductor Device
- Publication number 20080268655
- Publication date Oct 30, 2008
- Glenn Gale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF INTEGRATING METAL-CONTAINING FILMS INTO SEMICONDUCTOR DEV...
- Publication number 20080119033
- Publication date May 22, 2008
- TOKYO ELECTRON LIMITED
- Shigeo Ashigaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Peeling-off method and reworking method of resist film
- Publication number 20070184379
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Shigeo Ashigaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plasma treatment device
- Publication number 20070158027
- Publication date Jul 12, 2007
- TOKYO ELECTRON LIMITED
- Makoto Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma process device and plasma process method
- Publication number 20070131171
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma treatment device
- Publication number 20040159286
- Publication date Aug 19, 2004
- Makoto Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing device and plasma processing method
- Publication number 20040127033
- Publication date Jul 1, 2004
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS

Shigeo Ashigaki

Person

Patents Grantslast 30 patents

Plasma process device and plasma process method

Method for manufacturing semiconductor device

Method of integrating metal-containing films into semiconductor dev...

Patents Applicationslast 30 patents

Method for Manufacturing Semiconductor Device

METHOD OF INTEGRATING METAL-CONTAINING FILMS INTO SEMICONDUCTOR DEV...

Peeling-off method and reworking method of resist film

Plasma treatment device

Plasma process device and plasma process method

Plasma treatment device

Plasma processing device and plasma processing method