Shigeo Irie

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure method and apparatus
- Patent number 6,984,472
- Issue date Jan 10, 2006
- Matsushita Electric Industrial Co., Ltd.
- Shigeo Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and apparatus for fabricating semiconductor...
- Patent number 6,966,710
- Issue date Nov 22, 2005
- Matsushita Electric Industrial Co., Ltd.
- Shigeo Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and apparatus for fabricating semiconductor...
- Patent number 6,855,485
- Issue date Feb 15, 2005
- Matsushita Electric Industrial Co., Ltd.
- Shigeo Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for light exposure
- Patent number 6,677,108
- Issue date Jan 13, 2004
- Sony Corporation
- Nobuyuki Matsuzawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Pattern forming method and apparatus for fabricating semiconductor...
- Publication number 20040213563
- Publication date Oct 28, 2004
- Matsushita Electric Industrial Co., Ltd.
- Shigeo Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus
- Publication number 20040196446
- Publication date Oct 7, 2004
- Matsushita Electric Industrial Co., Ltd.
- Shigeo Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for light exposure
- Publication number 20020119401
- Publication date Aug 29, 2002
- Nobuyuki Matsuzawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Exposure method and apparatus
- Publication number 20010055104
- Publication date Dec 27, 2001
- Shigeo Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern forming method and apparatus for fabricating semiconductor...
- Publication number 20010055731
- Publication date Dec 27, 2001
- Shigeo Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY