Shigeo Kubota

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Kokubunji, JP

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Patents Grantslast 30 patents

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Surface treating apparatus, surface treating method and semiconduct...
- Patent number 5,505,778
- Issue date Apr 9, 1996
- Hitachi, Ltd.
- Tetsuo Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma x-ray source
- Patent number 4,715,054
- Issue date Dec 22, 1987
- Hitachi, Ltd.
- Yasuo Kato
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR