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Shigeo Oshiro
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Gloucester, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Platen for reducing particle contamination on a substrate and a met...
Patent number
10,658,207
Issue date
May 19, 2020
Varian Semiconductor Equipment Associates, Inc.
David E. Suuronen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platen for reducing particle contamination on a substrate and a met...
Patent number
9,953,849
Issue date
Apr 24, 2018
Varian Semiconductor Equipment Associates, Inc.
David E. Suuronen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Triboelectric charge controlled electrostatic clamp
Patent number
9,082,804
Issue date
Jul 14, 2015
Varian Semiconductor Equipment Associates, Inc.
Julian Blake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platen ground pin for connecting substrate to ground
Patent number
8,681,472
Issue date
Mar 25, 2014
Varian Semiconductor Equipment Associates, Inc.
David E. Suuronen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Platen For Reducing Particle Contamination On A Substrate and a Met...
Publication number
20180233386
Publication date
Aug 16, 2018
Varian Semiconductor Equipment Associates, Inc.
David E. Suuronen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Platen For Reducing Particle Contamination On A Substrate And A Met...
Publication number
20150279704
Publication date
Oct 1, 2015
David E. Suuronen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRIBOELECTRIC CHARGE CONTROLLED ELECTROSTATIC CLAMP
Publication number
20120200980
Publication date
Aug 9, 2012
Varian Semiconductor Equipment Associates, Inc.
Julian Blake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A MET...
Publication number
20090317964
Publication date
Dec 24, 2009
Varian Semiconductor Equipment Associates, Inc.
David E. SUURONEN
H01 - BASIC ELECTRIC ELEMENTS