Shigeo Sakino

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical unit and exposure apparatus having the same
- Patent number 7,771,065
- Issue date Aug 10, 2010
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Grant
Moving/guiding apparatus and exposure apparatus using the same
- Patent number 7,535,552
- Issue date May 19, 2009
- Canon Kabushiki Kaisha
- Shigeo Sakino
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Reflecting mirror and exposure apparatus using the same
- Patent number 7,453,623
- Issue date Nov 18, 2008
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Grant
Optical element holding apparatus, exposure apparatus and device ma...
- Patent number 7,443,619
- Issue date Oct 28, 2008
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Grant
Stage device, exposure apparatus, device manufacturing method and m...
- Patent number 6,644,855
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Shigeo Sakino
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for producing color filter, color filter, liqu...
- Patent number 6,244,702
- Issue date Jun 12, 2001
- Canon Kabushiki Kaishi
- Shigeo Sakino
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Apparatus for producing color filter with alignment error detection
- Patent number 5,984,470
- Issue date Nov 16, 1999
- Canon Kabushiki Kaisha
- Shigeo Sakino
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Motion guiding device
- Patent number 5,228,358
- Issue date Jul 20, 1993
- Canon Kabushiki Kaisha
- Shigeo Sakino
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Movement guiding mechanism
- Patent number 5,040,431
- Issue date Aug 20, 1991
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moving mechanism
- Patent number 4,744,675
- Issue date May 17, 1988
- Canon Kabushiki Kaisha
- Shigeo Sakino
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...
- Publication number 20070076310
- Publication date Apr 5, 2007
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Application
Reflecting mirror and exposure apparatus using the same
- Publication number 20060245035
- Publication date Nov 2, 2006
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Application
Optical unit and exposure apparatus having the same
- Publication number 20060232866
- Publication date Oct 19, 2006
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Application
Stage apparatus, static pressure bearing apparatus, positioning met...
- Publication number 20050002012
- Publication date Jan 6, 2005
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G11 - INFORMATION STORAGE
Information Patent Application
Moving/guiding apparatus and exposure apparatus using the same
- Publication number 20020128733
- Publication date Sep 12, 2002
- Canon Kabushiki Kaisha
- Shigeo Sakino
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Stage device, exposure apparatus, device manufacturing method and m...
- Publication number 20020118897
- Publication date Aug 29, 2002
- Canon Kabushiki Kaisha
- Shigeo Sakino
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Shigeo Sakino

Person

Patents Grantslast 30 patents

Optical unit and exposure apparatus having the same

Moving/guiding apparatus and exposure apparatus using the same

Reflecting mirror and exposure apparatus using the same

Optical element holding apparatus, exposure apparatus and device ma...

Stage device, exposure apparatus, device manufacturing method and m...

Method and apparatus for producing color filter, color filter, liqu...

Apparatus for producing color filter with alignment error detection

Motion guiding device

Movement guiding mechanism

Moving mechanism

Patents Applicationslast 30 patents

OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...

Reflecting mirror and exposure apparatus using the same

Optical unit and exposure apparatus having the same

Stage apparatus, static pressure bearing apparatus, positioning met...

Moving/guiding apparatus and exposure apparatus using the same

Stage device, exposure apparatus, device manufacturing method and m...