Shigeo Tanaka

Follow

Person

Niigata-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Positive resist compositions and patterning process
- Patent number 7,638,260
- Issue date Dec 29, 2009
- Shin-Etsu Chemical Co., Ltd.
- Akihiro Seki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Positive resist compositions and patterning process
- Patent number 7,618,764
- Issue date Nov 17, 2009
- Shin-Etsu Chemical Co., Ltd.
- Shigeo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sulfonyldiazomethane compounds, photoacid generator, resist materia...
- Patent number 7,282,316
- Issue date Oct 16, 2007
- Shin-Etsu Chemical Co., Ltd.
- Katsuhiro Kobayashi
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
Positive resist compositions and patterning process
- Publication number 20080268370
- Publication date Oct 30, 2008
- Shin-Etsu Chemical Co., Ltd.
- Shigeo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positive resist compositions and patterning process
- Publication number 20080124653
- Publication date May 29, 2008
- Shin-Etsu Chemical Co., Ltd.
- Akihiro Seki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positive resist compositions and patterning process
- Publication number 20080118863
- Publication date May 22, 2008
- Shin-Etsu Chemical Co., Ltd.
- Shigeo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Novel sulfonyldiazomethane compounds, photoacid generator, resist m...
- Publication number 20050048395
- Publication date Mar 3, 2005
- Shin-Etsu Chemical Co., Ltd.
- Katsuhiro Kobayashi
- C07 - ORGANIC CHEMISTRY