Shigeo Tomiyama

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Fujioka, JP

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Patents Grantslast 30 patents

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Vacuum system with a secondary gas also connected to the roughing p...
- Patent number 5,062,771
- Issue date Nov 5, 1991
- Hitachi, Ltd.
- Akihiko Satou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for LPCVD of semiconductors using oil free vacuum pumps
- Patent number 4,835,114
- Issue date May 30, 1989
- Hitachi, Ltd.
- Akihiko Satou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...