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Shigeoki Mori
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Ayase, JP
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last 30 patents
Information
Patent Grant
Probe device
Patent number
5,642,432
Issue date
Jun 24, 1997
Tokyo Electron Limited
Shigeoki Mori
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus for measuring electrical characteristics of objects
Patent number
5,416,592
Issue date
May 16, 1995
Tokyo Electron Kabushiki Kaisha
Shigeoki Mori
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus with a swinging holder for an object of examination
Patent number
5,404,111
Issue date
Apr 4, 1995
Tokyo Electron Limited
Shigeoki Mori
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus for probing an object held above the probe card
Patent number
5,321,453
Issue date
Jun 14, 1994
Tokyo Electron Limited
Shigeoki Mori
G01 - MEASURING TESTING