Shigeru Abe

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Kodama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 7,953,567
- Issue date May 31, 2011
- Hitachi High-Technologies Corporation
- Kei Shimura
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 7,672,799
- Issue date Mar 2, 2010
- Hitachi High-Technologies Corporation
- Kei Shimura
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Defect Inspection Apparatus and Defect Inspection Method
- Publication number 20100106443
- Publication date Apr 29, 2010
- Hitachi High-Technologies Corporation
- Kei SHIMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Inspection Apparatus and Defect Inspection Method
- Publication number 20080059094
- Publication date Mar 6, 2008
- Hitachi High-Technologies Corporation
- Kei SHIMURA
- G06 - COMPUTING CALCULATING COUNTING