Shigeru DAIGO

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Patents Grantslast 30 patents

Information Patent Grant
Wafer manufacturing system
- Patent number 11,728,193
- Issue date Aug 15, 2023
- Sumco Corporation
- Shigeru Daigo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of evaluating silicon wafer manufacturing process and method...
- Patent number 11,626,331
- Issue date Apr 11, 2023
- Sumco Corporation
- Shigeru Daigo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER MANUFACTURING SYSTEM
- Publication number 20230015459
- Publication date Jan 19, 2023
- SUMCO CORPORATION
- Shigeru DAIGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF EVALUATING SILICON WAFER MANUFACTURING PROCESS AND METHOD...
- Publication number 20200365472
- Publication date Nov 19, 2020
- SUMCO CORPORATION
- Shigeru DAIGO
- H01 - BASIC ELECTRIC ELEMENTS