Shigeru Hagiwara

Person

  • Kawasaki-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Exposure apparatus

    • Patent number 6,686,989
    • Issue date Feb 3, 2004
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus and its making method, and device manufacturing...

    • Patent number 6,583,857
    • Issue date Jun 24, 2003
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    SCANNING EXPOSURE IN WHICH AN OBJECT AND PULSED LIGHT ARE MOVED REL...

    • Patent number 6,538,723
    • Issue date Mar 25, 2003
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus

    • Patent number 6,437,851
    • Issue date Aug 20, 2002
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus

    • Patent number 6,297,871
    • Issue date Oct 2, 2001
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus

    • Patent number 6,222,610
    • Issue date Apr 24, 2001
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Alignment apparatus in projection exposure apparatus

    • Patent number 6,153,886
    • Issue date Nov 28, 2000
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Illuminating apparatus

    • Patent number 6,108,126
    • Issue date Aug 22, 2000
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Optical illumination device

    • Patent number 5,906,429
    • Issue date May 25, 1999
    • Nikon Corporation
    • Takashi Mori
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Air cleaning apparatus used for an exposure apparatus

    • Patent number 5,685,895
    • Issue date Nov 11, 1997
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposing apparatus

    • Patent number 5,381,210
    • Issue date Jan 10, 1995
    • Nikon Corporation
    • Shigeru Hagiwara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents