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Shigeru Haneda
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Sample holder and charged particle beam apparatus
Patent number
12,198,892
Issue date
Jan 14, 2025
HITACHI HIGH-TECH CORPORATION
Shigeru Haneda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and sample holder
Patent number
10,431,417
Issue date
Oct 1, 2019
Hitachi High-Technologies Corporation
Akira Ikeuchi
G01 - MEASURING TESTING
Information
Patent Grant
Stage apparatus and sample observation apparatus
Patent number
9,171,695
Issue date
Oct 27, 2015
Hitachi High-Technologies Corporation
Yasuyuki Momoi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Scanning electron microscope with a table being guided by rolling f...
Patent number
8,969,828
Issue date
Mar 3, 2015
Hitachi High-Technologies Corporation
Naoki Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and control method for stage device
Patent number
8,907,303
Issue date
Dec 9, 2014
Hitachi High-Technologies Corporation
Yasuyuki Momoi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage drive device
Patent number
8,638,026
Issue date
Jan 28, 2014
Hitachi High-Technologies Corporation
Masashi Shibahara
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
Sample Holder and Charged Particle Beam Apparatus
Publication number
20220277923
Publication date
Sep 1, 2022
HITACHI HIGH-TECH CORPORATION
Shigeru HANEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20200357601
Publication date
Nov 12, 2020
Hirohisa ENOMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Sample Holder
Publication number
20190122853
Publication date
Apr 25, 2019
Akira IKEUCHI
G01 - MEASURING TESTING
Information
Patent Application
Stage Apparatus and Sample Observation Apparatus
Publication number
20150206704
Publication date
Jul 23, 2015
Yasuyuki Momoi
G02 - OPTICS
Information
Patent Application
STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE
Publication number
20140117251
Publication date
May 1, 2014
Hitachi High-Technologies Corporation
Yasuyuki Momoi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE APPARATUS
Publication number
20130082190
Publication date
Apr 4, 2013
Hitachi High-Technologies Corporation
Yasuyuki Momoi
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20130056636
Publication date
Mar 7, 2013
Hitachi High-Technologies Corporation
Shigeru Haneda
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20130048854
Publication date
Feb 28, 2013
Hitachi High-Technologies Corporation
Naoki Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DRIVE DEVICE
Publication number
20110260558
Publication date
Oct 27, 2011
Masashi Shibahara
H01 - BASIC ELECTRIC ELEMENTS