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Shigeru Iijima
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Matsudo, JP
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last 30 patents
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Patent Grant
Silicon thin film and method of producing the same
Patent number
5,017,308
Issue date
May 21, 1991
Toa Nenryo Kogyo K.K.
Shigeru Iijima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...