Shigeru Ishizawa

Person

Nirasaki-Shi Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Focus ring replacement method and plasma processing system
- Patent number 11,990,323
- Issue date May 21, 2024
- Tokyo Electron Limited
- Shigeru Ishizawa
- B08 - CLEANING
Information Patent Grant
Focus ring replacement method and plasma processing system
- Patent number 10,490,392
- Issue date Nov 26, 2019
- Tokyo Electron Limited
- Shigeru Ishizawa
- B08 - CLEANING
Information Patent Grant
Substrate transfer method and substrate processing apparatus
- Patent number 10,468,278
- Issue date Nov 5, 2019
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate replacing method and substrate processing apparatus
- Patent number 8,663,489
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transportation apparatus and drive mechanism
- Patent number 7,837,425
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing device
- Patent number 7,780,391
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Takaaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processed body carrying device, and processing system with carrying...
- Patent number 7,622,006
- Issue date Nov 24, 2009
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer mechanism and semiconductor processing system
- Patent number 7,532,940
- Issue date May 12, 2009
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for carrying object to be processed
- Patent number 7,371,683
- Issue date May 13, 2008
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus for target object
- Patent number 7,286,890
- Issue date Oct 23, 2007
- Tokyo Electron Limited
- Wataru Machiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system and method of transferring workpiece
- Patent number 6,983,195
- Issue date Jan 3, 2006
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier system positioning method
- Patent number 6,510,365
- Issue date Jan 21, 2003
- Tokyo Electron Limited
- Yasuhiko Nishinakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deadlock avoidance method and treatment system for object to be tre...
- Patent number 6,466,835
- Issue date Oct 15, 2002
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 6,328,864
- Issue date Dec 11, 2001
- Tokyo Electron Limited
- Shigeru Ishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for recovering object to be treated after interruption
- Patent number 6,162,010
- Issue date Dec 19, 2000
- Tokyo Electron Limited
- Shigeru Ishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of sensing access positions of arm
- Patent number 6,144,926
- Issue date Nov 7, 2000
- Tokyo Electron Limited
- Shigeru Ishizawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and method for performing serial communication between ma...
- Patent number 5,754,780
- Issue date May 19, 1998
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20230282460
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Shigeru ISHIZAWA
- B08 - CLEANING
Information Patent Application
FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20230282461
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Shigeru ISHIZAWA
- B08 - CLEANING
Information Patent Application
FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20200035471
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Shigeru ISHIZAWA
- B08 - CLEANING
Information Patent Application
FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20200035470
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Shigeru ISHIZAWA
- B08 - CLEANING
Information Patent Application
FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20190122870
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Shigeru ISHIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20180061692
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Toru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20180019107
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Shigeru ISHIZAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160284577
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Shigeru ISHIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE...
- Publication number 20120308341
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD FOR TRANSFER ARM, CLEANING METHOD FOR SUBSTRATE PRO...
- Publication number 20110108056
- Publication date May 12, 2011
- TOKYO ELECTRON LIMITED
- Shigeru Ishizawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE REPLACING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20100252532
- Publication date Oct 7, 2010
- TOKYO ELECTRON LIMITED
- SHIGERU ISHIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20070107845
- Publication date May 17, 2007
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer apparatus for target object
- Publication number 20060291988
- Publication date Dec 28, 2006
- Wataru Machiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer mechanism and semiconductor processing system
- Publication number 20060287761
- Publication date Dec 21, 2006
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transportation apparatus and drive mechanism
- Publication number 20060210387
- Publication date Sep 21, 2006
- TOKYO ELECTRON LIMITED
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Method for carrying object to be processed
- Publication number 20060021575
- Publication date Feb 2, 2006
- TOKYO ELECTRON LIMITED
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing device
- Publication number 20050238464
- Publication date Oct 27, 2005
- Tokyo Electron Limited
- Takaaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Teaching method and processing system
- Publication number 20050220582
- Publication date Oct 6, 2005
- TOKYO ELECTRON LIMITED
- Motohiro Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processed body carrying device, and processing system with carrying...
- Publication number 20050087300
- Publication date Apr 28, 2005
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system
- Publication number 20040238122
- Publication date Dec 2, 2004
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of transferring processed body and processing system for pro...
- Publication number 20040043513
- Publication date Mar 4, 2004
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system and method of transferring workpiece
- Publication number 20040029300
- Publication date Feb 12, 2004
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS

Shigeru Ishizawa

Person

Patents Grantslast 30 patents

Focus ring replacement method and plasma processing system

Focus ring replacement method and plasma processing system

Substrate transfer method and substrate processing apparatus

Substrate replacing method and substrate processing apparatus

Transportation apparatus and drive mechanism

Substrate processing device

Processed body carrying device, and processing system with carrying...

Transfer mechanism and semiconductor processing system

Method for carrying object to be processed

Transfer apparatus for target object

Semiconductor processing system and method of transferring workpiece

Carrier system positioning method

Deadlock avoidance method and treatment system for object to be tre...

Vacuum processing apparatus

Method for recovering object to be treated after interruption

Method of sensing access positions of arm

Apparatus and method for performing serial communication between ma...

Patents Applicationslast 30 patents

FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM

FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM

FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM

FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM

FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM

SUBSTRATE TRANSFER METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE...

CLEANING METHOD FOR TRANSFER ARM, CLEANING METHOD FOR SUBSTRATE PRO...

SUBSTRATE REPLACING METHOD AND SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING SYSTEM

Transfer apparatus for target object

Transfer mechanism and semiconductor processing system

Transportation apparatus and drive mechanism

Method for carrying object to be processed

Substrate processing device

Teaching method and processing system

Processed body carrying device, and processing system with carrying...

Semiconductor processing system

Method of transferring processed body and processing system for pro...

Semiconductor processing system and method of transferring workpiece