Shigeru Kakuta

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma treatment method and manufacturing method of semiconductor d...
- Patent number 6,186,153
- Issue date Feb 13, 2001
- Hitachi, Ltd.
- Hiroyuki Kitsunai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...