Shigeru Kanbayashi

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron-beam lithography system and method for drawing nanometer-o...
- Patent number 5,767,521
- Issue date Jun 16, 1998
- Kabushiki Kaisha Toshiba
- Shiro Takeno
- B82 - NANO-TECHNOLOGY