Shigeru Kasai

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection apparatus and inspection method
- Patent number 11,940,485
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Naoki Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placement table, testing device, and testing method
- Patent number 11,828,794
- Issue date Nov 28, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus including power supply for supplying power to...
- Patent number 11,774,488
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- G01 - MEASURING TESTING
Information Patent Grant
Dummy wafer
- Patent number 11,776,829
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test device control method and test device
- Patent number 11,768,236
- Issue date Sep 26, 2023
- Tokyo Electron Limited
- Hiroaki Agawa
- G01 - MEASURING TESTING
Information Patent Grant
Temperature adjustment method for mounting base, inspection device,...
- Patent number 11,762,011
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- G01 - MEASURING TESTING
Information Patent Grant
Silicon heater bonded to a test wafer
- Patent number 11,668,665
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 11,543,445
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus and inspection method
- Patent number 11,525,856
- Issue date Dec 13, 2022
- Tokyo Electron Limited
- Naoki Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table, and method of manufacturing the mounting table
- Patent number 11,425,791
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus and temperature control meihod
- Patent number 11,385,280
- Issue date Jul 12, 2022
- Tokyo Electron Limited
- Shigeru Kasai
- G01 - MEASURING TESTING
Information Patent Grant
Testing device
- Patent number 11,340,283
- Issue date May 24, 2022
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placement stand and electronic device inspecting apparatus
- Patent number 11,221,358
- Issue date Jan 11, 2022
- Tokyo Electron Limited
- Shigeru Kasai
- G01 - MEASURING TESTING
Information Patent Grant
Temperature control device, temperature control method, and inspect...
- Patent number 11,169,204
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Masahito Kobayashi
- G01 - MEASURING TESTING
Information Patent Grant
Prober
- Patent number 11,125,813
- Issue date Sep 21, 2021
- Tokyo Electron Limited
- Shigeru Kasai
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing device with shower plate having protrusion for su...
- Patent number 10,557,200
- Issue date Feb 11, 2020
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma source and plasma processing apparatus
- Patent number 10,319,567
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and shower plate
- Patent number 9,663,856
- Issue date May 30, 2017
- Tokyo Electron Limited
- Shigeru Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming insulating film and method for manufacturing sem...
- Patent number 9,640,388
- Issue date May 2, 2017
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna for plasma generation, plasma processing apparatus and plas...
- Patent number 9,552,966
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave radiation antenna, microwave plasma source and plasma pro...
- Patent number 9,548,187
- Issue date Jan 17, 2017
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma generation antenna
- Patent number 9,543,123
- Issue date Jan 10, 2017
- TOKYO ELECTRONICS LIMITED
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,362,149
- Issue date Jun 7, 2016
- Tokyo Electron Limited
- Yusuke Muraki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave introducing mechanism, microwave plasma source and microw...
- Patent number 9,281,154
- Issue date Mar 8, 2016
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave irradiation apparatus
- Patent number 9,224,623
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Shigeru Kasai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Liquid processing apparatus, liquid processing method, and recordin...
- Patent number 9,202,731
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave heating apparatus and processing method
- Patent number 9,204,500
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Taro Ikeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electromagnetic-radiation power-supply mechanism for exciting a coa...
- Patent number 9,072,158
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Taro Ikeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Surface wave plasma generating antenna and surface wave plasma proc...
- Patent number 8,945,342
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave irradiation device and microwave irradiation method
- Patent number 8,907,259
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Shigeru Kasai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Inspection Apparatus and Mounting Base
- Publication number 20250076232
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE CALIBRATION SYSTEM, INSPECTION APPARATUS, AND TEMPERATU...
- Publication number 20240402021
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Tomohiro OTA
- G01 - MEASURING TESTING
Information Patent Application
LED CHUCK
- Publication number 20240159825
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Tomoki NUKANOBU
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE CONTROL DEVICE, TEMPERATURE CONTROL METHOD, AND INSPECT...
- Publication number 20220262661
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE ADJUSTMENT METHOD FOR MOUNTING BASE, INSPECTION DEVICE,...
- Publication number 20220221509
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
HEATING DEVICE AND CONTROL METHOD OF LED
- Publication number 20220191974
- Publication date Jun 16, 2022
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
POWER SUPPLY AND INSPECTION APPARATUS
- Publication number 20220178988
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
TEST DEVICE CONTROL METHOD AND TEST DEVICE
- Publication number 20220178994
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Hiroaki AGAWA
- G01 - MEASURING TESTING
Information Patent Application
HEATER TEMPERATURE CONTROL METHOD, HEATER, AND PLACEMENT STAND
- Publication number 20220151026
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACEMENT TABLE, TESTING DEVICE, AND TESTING METHOD
- Publication number 20220128624
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CONTROLLING TEMPERATURE OF SUBSTRATE SUPPORT AND INSPECT...
- Publication number 20220015193
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20210389366
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Naoki AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20210382105
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Naoki AKIYAMA
- G01 - MEASURING TESTING
Information Patent Application
DUMMY WAFER
- Publication number 20210265183
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- B32 - LAYERED PRODUCTS
Information Patent Application
INSPECTION APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20210208194
- Publication date Jul 8, 2021
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
PLACEMENT STAND AND ELECTRONIC DEVICE INSPECTING APPARATUS
- Publication number 20210102991
- Publication date Apr 8, 2021
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
PROBER
- Publication number 20210033666
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
TESTING DEVICE
- Publication number 20200408828
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20200386805
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
Mounting Table, and Method of Manufacturing the Mounting Table
- Publication number 20200205233
- Publication date Jun 25, 2020
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- B32 - LAYERED PRODUCTS
Information Patent Application
TEST WAFER AND METHOD FOR MANUFACTURING SAME
- Publication number 20200173942
- Publication date Jun 4, 2020
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control Device, Temperature Control Method, and Inspect...
- Publication number 20200174066
- Publication date Jun 4, 2020
- TOKYO ELECTRON LIMITED
- Masahito KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
Plasma Processing Apparatus and Plasma Processing Method
- Publication number 20170263421
- Publication date Sep 14, 2017
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
- Publication number 20160284516
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING INSULATING FILM AND METHOD FOR MANUFACTURING SEM...
- Publication number 20160240374
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20160222516
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20160013056
- Publication date Jan 14, 2016
- Tokyo Electron Limited
- Shigeru KASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method, Etching Apparatus, and Storage Medium
- Publication number 20150072533
- Publication date Mar 12, 2015
- TOKYO ELECTRON LIMITED
- Yusuke MURAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA FOR PLASMA GENERATION, PLASMA PROCESSING APPARATUS AND PLAS...
- Publication number 20140339981
- Publication date Nov 20, 2014
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SHOWER PLATE
- Publication number 20140283747
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Shigeru Kasai

Person

Patents Grantslast 30 patents

Inspection apparatus and inspection method

Placement table, testing device, and testing method

Inspection apparatus including power supply for supplying power to...

Dummy wafer

Test device control method and test device

Temperature adjustment method for mounting base, inspection device,...

Silicon heater bonded to a test wafer

Inspection apparatus

Inspection apparatus and inspection method

Mounting table, and method of manufacturing the mounting table

Inspection apparatus and temperature control meihod

Testing device

Placement stand and electronic device inspecting apparatus

Temperature control device, temperature control method, and inspect...

Prober

Plasma processing device with shower plate having protrusion for su...

Microwave plasma source and plasma processing apparatus

Plasma processing apparatus and shower plate

Method for forming insulating film and method for manufacturing sem...

Antenna for plasma generation, plasma processing apparatus and plas...

Microwave radiation antenna, microwave plasma source and plasma pro...

Plasma processing apparatus and plasma generation antenna

Etching method, etching apparatus, and storage medium

Microwave introducing mechanism, microwave plasma source and microw...

Microwave irradiation apparatus

Liquid processing apparatus, liquid processing method, and recordin...

Microwave heating apparatus and processing method

Electromagnetic-radiation power-supply mechanism for exciting a coa...

Surface wave plasma generating antenna and surface wave plasma proc...

Microwave irradiation device and microwave irradiation method

Patents Applicationslast 30 patents

Inspection Apparatus and Mounting Base

TEMPERATURE CALIBRATION SYSTEM, INSPECTION APPARATUS, AND TEMPERATU...

LED CHUCK

TEMPERATURE CONTROL DEVICE, TEMPERATURE CONTROL METHOD, AND INSPECT...

TEMPERATURE ADJUSTMENT METHOD FOR MOUNTING BASE, INSPECTION DEVICE,...

HEATING DEVICE AND CONTROL METHOD OF LED

POWER SUPPLY AND INSPECTION APPARATUS

TEST DEVICE CONTROL METHOD AND TEST DEVICE

HEATER TEMPERATURE CONTROL METHOD, HEATER, AND PLACEMENT STAND

PLACEMENT TABLE, TESTING DEVICE, AND TESTING METHOD

METHOD FOR CONTROLLING TEMPERATURE OF SUBSTRATE SUPPORT AND INSPECT...

INSPECTION APPARATUS AND INSPECTION METHOD

INSPECTION APPARATUS AND INSPECTION METHOD

DUMMY WAFER

INSPECTION APPARATUS AND TEMPERATURE CONTROL METHOD

PLACEMENT STAND AND ELECTRONIC DEVICE INSPECTING APPARATUS

PROBER

TESTING DEVICE

INSPECTION DEVICE

Mounting Table, and Method of Manufacturing the Mounting Table

TEST WAFER AND METHOD FOR MANUFACTURING SAME

Temperature Control Device, Temperature Control Method, and Inspect...

Plasma Processing Apparatus and Plasma Processing Method

MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

METHOD FOR FORMING INSULATING FILM AND METHOD FOR MANUFACTURING SEM...

PLASMA PROCESSING DEVICE

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

Etching Method, Etching Apparatus, and Storage Medium

ANTENNA FOR PLASMA GENERATION, PLASMA PROCESSING APPARATUS AND PLAS...

PLASMA PROCESSING APPARATUS AND SHOWER PLATE