Membership
Tour
Register
Log in
Shigeru Kawamura
Follow
Person
Yamanashi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and substr...
Patent number
8,945,412
Issue date
Feb 3, 2015
Tokyo Electron Limited
Shigeru Kawamura
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
8,647,440
Issue date
Feb 11, 2014
Tokyo Electron Limited
Shigeru Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analysis method and analysis apparatus
Patent number
7,923,680
Issue date
Apr 12, 2011
Tokyo Electron Limited
Kazuya Dobashi
G01 - MEASURING TESTING
Information
Patent Grant
Film forming method by radiating a plasma on a surface of a low die...
Patent number
6,800,546
Issue date
Oct 5, 2004
Tokyo Electron Limited
Nobuo Konishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for observing porous amorphous film, and metho...
Patent number
6,528,108
Issue date
Mar 4, 2003
Tokyo Electron Limited
Shigeru Kawamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND SUBSTR...
Publication number
20120298132
Publication date
Nov 29, 2012
TOKYO ELECTRON LIMITED
Shigeru KAWAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF HELPING PARTICLE DETECTION, METHOD OF PARTICLE DETECTION,...
Publication number
20110058157
Publication date
Mar 10, 2011
TOKYO ELECTRON LIMITED
Shigeru Kawamura
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100043820
Publication date
Feb 25, 2010
TOKYO ELECTRON LIMITED
Shigeru KAWAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Analyzing Method and Analyzing Apparatus
Publication number
20090218483
Publication date
Sep 3, 2009
Tokyo Electron Limited
Kazuya Dobashi
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND SUBSTR...
Publication number
20090065027
Publication date
Mar 12, 2009
TOKYO ELECTRON LIMITED
Shigeru Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20080230096
Publication date
Sep 25, 2008
TOKYO ELECTRON LIMITED
Shigeru KAWAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film forming method and film forming apparatus
Publication number
20050026454
Publication date
Feb 3, 2005
Nobuo Konishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Analyzing method for non-uniform-density sample and device and syst...
Publication number
20030157559
Publication date
Aug 21, 2003
Kazuhiko Omote
G01 - MEASURING TESTING
Information
Patent Application
Film forming method and film forming apparatus
Publication number
20020177298
Publication date
Nov 28, 2002
Nobuo Konishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for observing porous amorphous film, and metho...
Publication number
20020122879
Publication date
Sep 5, 2002
TOKYO ELECTRON LIMITED
Shigeru Kawamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...