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Shigeru Kawata
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Ayase-shi, Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Cooling apparatus and substrate treating apparatus
Patent number
8,189,169
Issue date
May 29, 2012
Tokyo Ohka Kogyo Co., Ltd.
Futoshi Shimai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slit nozzle and apparatus for supplying treatment liquid using slit...
Patent number
7,381,270
Issue date
Jun 3, 2008
Tokyo Ohka Kogya Co., Ltd.
Futoshi Shimai
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
SUCTION DEVICE
Publication number
20160016318
Publication date
Jan 21, 2016
Meiko Electronics Co., Ltd.
Shigeru Kawata
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Cooling apparatus and substrate treating apparatus
Publication number
20080304027
Publication date
Dec 11, 2008
Tokyo Ohka Kogyo Co., Ltd.
Futoshi Shimai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus
Publication number
20070240642
Publication date
Oct 18, 2007
Tokyo Ohka Kogyo Co., Ltd.
Futoshi Shimai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Slit nozzle and apparatus for supplying treatment liquid using slit...
Publication number
20070044712
Publication date
Mar 1, 2007
Tokyo Ohka Kogyo Co., Ltd.
Futoshi Shimai
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...