Shigeru KUBOTA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and storage medium having program store...
- Patent number 7,774,082
- Issue date Aug 10, 2010
- Tokyo Electron Limited
- Shigeru Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONVEYANCE METHOD AND PROCESSING SYSTEM
- Publication number 20230411194
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210280445
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM HAVING PROGRAM STORE...
- Publication number 20080091290
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Shigeru KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS