Shigeru MAIDA

Person

Joetsu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Titania-doped quartz glass and making method
- Patent number 10,114,280
- Issue date Oct 30, 2018
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Titania-doped quartz glass and making method
- Patent number 9,746,773
- Issue date Aug 29, 2017
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Titania-doped quartz glass and making method
- Patent number 9,612,525
- Issue date Apr 4, 2017
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Titania-doped quartz glass and making method
- Patent number 9,346,700
- Issue date May 24, 2016
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Titania doped quartz glass and making method
- Patent number 9,296,636
- Issue date Mar 29, 2016
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
EUV lithography member, making method, and titania-doped quartz glass
- Patent number 9,278,881
- Issue date Mar 8, 2016
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method of producing synthetic quartz glass for excimer laser
- Patent number 9,067,814
- Issue date Jun 30, 2015
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Nanoimprint mold-forming synthetic quartz glass and making method
- Patent number 9,056,785
- Issue date Jun 16, 2015
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Titania-doped quartz glass and making method
- Patent number 8,820,122
- Issue date Sep 2, 2014
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Titania and sulfur co-doped quartz glass member and making method
- Patent number 8,629,071
- Issue date Jan 14, 2014
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Titania and sulfur co-doped quartz glass member and making method
- Patent number 8,539,797
- Issue date Sep 24, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Titania-doped quartz glass member and making method
- Patent number 8,377,612
- Issue date Feb 19, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Titania-doped quartz glass member and making method
- Patent number 8,105,734
- Issue date Jan 31, 2012
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Titania-doped quartz glass for nanoimprint molds
- Patent number 7,935,648
- Issue date May 3, 2011
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Titania-doped quartz glass for nanoimprint molds
- Patent number 7,923,394
- Issue date Apr 12, 2011
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Titania-doped quartz glass and making method, EUV lithographic memb...
- Patent number 7,849,711
- Issue date Dec 14, 2010
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Titania-doped quartz glass and making method, EUV lithographic memb...
- Patent number 7,585,598
- Issue date Sep 8, 2009
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of producing synthetic quartz glass
- Patent number 7,159,418
- Issue date Jan 9, 2007
- Shin-Etsu Chemical Co, Ltd.
- Koji Matsuo
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method of producing fluorine-containing synthetic quartz glass
- Patent number 6,990,836
- Issue date Jan 31, 2006
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
- Publication number 20170038672
- Publication date Feb 9, 2017
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
- Publication number 20160306271
- Publication date Oct 20, 2016
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
EUV LITHOGRAPHY MEMBER, MAKING METHOD, AND TITANIA-DOPED QUARTZ GLASS
- Publication number 20140206524
- Publication date Jul 24, 2014
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
NANOIMPRINT MOLD-FORMING SYNTHETIC QUARTZ GLASS AND MAKING METHOD
- Publication number 20140018229
- Publication date Jan 16, 2014
- Shigeru Maida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
- Publication number 20130283858
- Publication date Oct 31, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Application
TITANIA AND SULFUR CO-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD
- Publication number 20130149637
- Publication date Jun 13, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
- Publication number 20130045439
- Publication date Feb 21, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
- Publication number 20120258389
- Publication date Oct 11, 2012
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
TITANIA-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD
- Publication number 20120104336
- Publication date May 3, 2012
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
- Publication number 20120058419
- Publication date Mar 8, 2012
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
- Publication number 20110159413
- Publication date Jun 30, 2011
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Application
TITANIA AND SULFUR CO-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD
- Publication number 20110117480
- Publication date May 19, 2011
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF PRODUCING SYNTHETIC QUARTZ GLASS FOR EXCIMER LASER
- Publication number 20100180634
- Publication date Jul 22, 2010
- Shigeru Maida
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
TITANIA-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD
- Publication number 20100003609
- Publication date Jan 7, 2010
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD, EUV LITHOGRAPHIC MEMB...
- Publication number 20090288448
- Publication date Nov 26, 2009
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Application
TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS
- Publication number 20080305940
- Publication date Dec 11, 2008
- Shin-Etsu Chemical Co., Ltd.
- Shigeru MAIDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS
- Publication number 20080305941
- Publication date Dec 11, 2008
- Shin-Etsu Chemical Co., Ltd.
- Shigeru MAIDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Titania-doped quartz glass and making method, EUV lithographic memb...
- Publication number 20070134566
- Publication date Jun 14, 2007
- Shin-Etsu Chemical Co., Ltd.
- Shigeru Maida
- B82 - NANO-TECHNOLOGY
Information Patent Application
Synthetic qurtz glass and method of production
- Publication number 20020038557
- Publication date Apr 4, 2002
- Shin-Etsu Chemical Co., Ltd.
- Koji Matsuo
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Fluorine-containing synthetic quartz glass and method of production
- Publication number 20010017042
- Publication date Aug 30, 2001
- Shigeru Maida
- C03 - GLASS MINERAL OR SLAG WOOL

Shigeru MAIDA

Person

Patents Grantslast 30 patents

Titania-doped quartz glass and making method

Titania-doped quartz glass and making method

Titania-doped quartz glass and making method

Titania-doped quartz glass and making method

Titania doped quartz glass and making method

EUV lithography member, making method, and titania-doped quartz glass

Method of producing synthetic quartz glass for excimer laser

Nanoimprint mold-forming synthetic quartz glass and making method

Titania-doped quartz glass and making method

Titania and sulfur co-doped quartz glass member and making method

Titania and sulfur co-doped quartz glass member and making method

Titania-doped quartz glass member and making method

Titania-doped quartz glass member and making method

Titania-doped quartz glass for nanoimprint molds

Titania-doped quartz glass for nanoimprint molds

Titania-doped quartz glass and making method, EUV lithographic memb...

Titania-doped quartz glass and making method, EUV lithographic memb...

Method of producing synthetic quartz glass

Method of producing fluorine-containing synthetic quartz glass

Patents Applicationslast 30 patents

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

EUV LITHOGRAPHY MEMBER, MAKING METHOD, AND TITANIA-DOPED QUARTZ GLASS

NANOIMPRINT MOLD-FORMING SYNTHETIC QUARTZ GLASS AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

TITANIA AND SULFUR CO-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

TITANIA AND SULFUR CO-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD

METHOD OF PRODUCING SYNTHETIC QUARTZ GLASS FOR EXCIMER LASER

TITANIA-DOPED QUARTZ GLASS MEMBER AND MAKING METHOD

TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD, EUV LITHOGRAPHIC MEMB...

TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS

TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS

Titania-doped quartz glass and making method, EUV lithographic memb...

Synthetic qurtz glass and method of production

Fluorine-containing synthetic quartz glass and method of production