Shigeru Matsui

Person

Koganei, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Curved grating, method for manufacturing the same, and optical device
- Patent number 9,945,993
- Issue date Apr 17, 2018
- Hitachi High-Technologies Corporation
- Takanori Aono
- G02 - OPTICS
Information Patent Grant
Curved face diffraction grating fabrication method, curved face dif...
- Patent number 9,709,714
- Issue date Jul 18, 2017
- Hitachi High-Technologies Corporation
- Takanori Aono
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Surface profile measurement method and device used therein
- Patent number 9,631,924
- Issue date Apr 25, 2017
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Phase shift mask, method of forming asymmetric pattern, method of m...
- Patent number 9,390,934
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Kazuyuki Kakuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source device, surface inspecting apparatus using the device,...
- Patent number 9,157,866
- Issue date Oct 13, 2015
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspecting apparatus and surface inspecting method
- Patent number 9,046,499
- Issue date Jun 2, 2015
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection method and apparatus
- Patent number 8,934,092
- Issue date Jan 13, 2015
- Hitachi High-Technologies Corporation
- Yoshimasa Oshima
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspection method and optical inspection apparatus
- Patent number 8,878,119
- Issue date Nov 4, 2014
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 8,823,929
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Masaaki Ito
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting particles and defects and inspection equipment...
- Patent number RE44977
- Issue date Jul 1, 2014
- Hitachi High-Technologies Corporation
- Takahiro Togashi
- 356 - Optics: measuring and testing
Information Patent Grant
Light source device, surface inspecting apparatus using the device,...
- Patent number 8,743,357
- Issue date Jun 3, 2014
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Appearance inspection apparatus
- Patent number 8,699,017
- Issue date Apr 15, 2014
- Hitachi High-Technologies Corporation
- Kenji Oka
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting particles and defects and inspection equipment...
- Patent number RE44840
- Issue date Apr 15, 2014
- Hitachi High-Technologies Corporation
- Takahiro Togashi
- 356 - Optics: measuring and testing
Information Patent Grant
Inspection apparatus
- Patent number 8,542,354
- Issue date Sep 24, 2013
- Hitachi High-Technologies Corporation
- Masaaki Ito
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspecting apparatus and surface inspecting method
- Patent number 8,493,557
- Issue date Jul 23, 2013
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Appearance inspection apparatus
- Patent number 8,462,327
- Issue date Jun 11, 2013
- Hitachi High-Technologies Corporation
- Kenji Oka
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection method and apparatus
- Patent number 8,400,629
- Issue date Mar 19, 2013
- Hitachi High-Technologies Corporation
- Yoshimasa Oshima
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and surface inspection apparatus
- Patent number 8,305,568
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Capillary electrophoresis apparatus and electrophoresis method
- Patent number 8,246,803
- Issue date Aug 21, 2012
- Hitachi High-Technologies Corporation
- Motohiro Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and surface inspection apparatus
- Patent number 8,248,594
- Issue date Aug 21, 2012
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspection method and optical inspection apparatus
- Patent number 8,243,263
- Issue date Aug 14, 2012
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Appearance inspection apparatus
- Patent number 8,169,606
- Issue date May 1, 2012
- Hitachi High-Technologies Corporation
- Kenji Oka
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and surface inspection apparatus
- Patent number 8,160,352
- Issue date Apr 17, 2012
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting particles and defects and inspection equipment...
- Patent number 8,094,298
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Takahiro Togashi
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection method and apparatus
- Patent number 8,035,808
- Issue date Oct 11, 2011
- Hitachi High-Technologies Corporation
- Yoshimasa Oshima
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspection method and optical inspection apparatus
- Patent number 7,990,530
- Issue date Aug 2, 2011
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspection method and optical inspection apparatus
- Patent number 7,973,922
- Issue date Jul 5, 2011
- Hitachi High-Tecnologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and inspecting device using the same
- Patent number 7,952,701
- Issue date May 31, 2011
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and surface inspection apparatus
- Patent number 7,916,287
- Issue date Mar 29, 2011
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and surface inspection apparatus
- Patent number 7,872,742
- Issue date Jan 18, 2011
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Curved Grating, Method for Manufacturing the Same, and Optical Device
- Publication number 20160282526
- Publication date Sep 29, 2016
- Hitachi High-Technologies Corporation
- Takanori AONO
- G02 - OPTICS
Information Patent Application
Surface Profile Measurement Method and Device Used Therein
- Publication number 20160091304
- Publication date Mar 31, 2016
- Hitachi High-Technologies Corporation
- Shigeru MATSUI
- G01 - MEASURING TESTING
Information Patent Application
CURVED FACE DIFFRACTION GRATING FABRICATION METHOD, CURVED FACE DIF...
- Publication number 20150192713
- Publication date Jul 9, 2015
- Hitachi High-Technologies Corporation
- Takanori Aono
- B32 - LAYERED PRODUCTS
Information Patent Application
PHASE SHIFT MASK, METHOD OF FORMING ASYMMETRIC PATTERN, METHOD OF M...
- Publication number 20140302679
- Publication date Oct 9, 2014
- Hitachi High-Technologies Corporation
- Kazuyuki Kakuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT SOURCE DEVICE, SURFACE INSPECTING APPARATUS USING THE DEVICE,...
- Publication number 20140185041
- Publication date Jul 3, 2014
- Hitachi High-Technologies Corporation
- Shigeru MATSUI
- G01 - MEASURING TESTING
Information Patent Application
SURFACE DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20140176943
- Publication date Jun 26, 2014
- Hitachi High-Technologies Corporation
- Yoshimasa OSHIMA
- G01 - MEASURING TESTING
Information Patent Application
DIFFRACTION GRATING MANUFACTURING METHOD, SPECTROPHOTOMETER, AND SE...
- Publication number 20140092384
- Publication date Apr 3, 2014
- Hitachi High-Technologies Corporation
- Yoshisada Ebata
- G02 - OPTICS
Information Patent Application
SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD
- Publication number 20140009756
- Publication date Jan 9, 2014
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140002810
- Publication date Jan 2, 2014
- Hitachi High-Technologies Corporation
- Masaaki Ito
- G01 - MEASURING TESTING
Information Patent Application
Appearance Inspection Apparatus
- Publication number 20130242293
- Publication date Sep 19, 2013
- Hitachi High-Technologies Corporation
- Kenji OKA
- G01 - MEASURING TESTING
Information Patent Application
SPECTROPHOTOMETER
- Publication number 20130222789
- Publication date Aug 29, 2013
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
SURFACE DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20130208271
- Publication date Aug 15, 2013
- Hitachi High-Technologies Corporation
- Yoshimasa OSHIMA
- G01 - MEASURING TESTING
Information Patent Application
SPECTROPHOTOMETER
- Publication number 20130107255
- Publication date May 2, 2013
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS
- Publication number 20120273660
- Publication date Nov 1, 2012
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
Appearance Inspection Apparatus
- Publication number 20120194808
- Publication date Aug 2, 2012
- Hitachi High-Technologies Corporation
- Kenji OKA
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS
- Publication number 20120176611
- Publication date Jul 12, 2012
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD
- Publication number 20120044505
- Publication date Feb 23, 2012
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
SURFACE DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20120008138
- Publication date Jan 12, 2012
- Yoshimasa OSHIMA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS
- Publication number 20110255082
- Publication date Oct 20, 2011
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
Surface Inspection Method and Surface Inspection Apparatus
- Publication number 20110141461
- Publication date Jun 16, 2011
- Hitachi High-Technologies Corporation
- Shigeru MATSUI
- G01 - MEASURING TESTING
Information Patent Application
LIGHT SOURCE DEVICE, SURFACE INSPECTING APPARATUS USING THE DEVICE,...
- Publication number 20110134418
- Publication date Jun 9, 2011
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS
- Publication number 20110075135
- Publication date Mar 31, 2011
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
Surface Inspection Method and Surface Inspection Apparatus
- Publication number 20100271625
- Publication date Oct 28, 2010
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
SURFACE DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20100265494
- Publication date Oct 21, 2010
- Yoshimasa OSHIMA
- G01 - MEASURING TESTING
Information Patent Application
Appearance Inspection Apparatus
- Publication number 20100259750
- Publication date Oct 14, 2010
- Hitachi High-Technologies Corporation
- Kenji OKA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS
- Publication number 20100253938
- Publication date Oct 7, 2010
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
Surface Inspection Method and Surface Inspection Apparatus
- Publication number 20100188656
- Publication date Jul 29, 2010
- Hitachi High-Technologies Corporation
- Shigeru MATSUI
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS
- Publication number 20100118310
- Publication date May 13, 2010
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G01 - MEASURING TESTING
Information Patent Application
PATTERN DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20100021041
- Publication date Jan 28, 2010
- Hitachi High-Technologies Corporation
- Shigeru Matsui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT...
- Publication number 20100020315
- Publication date Jan 28, 2010
- Hitachi High-Technologies Corp
- Takahiro Togashi
- G01 - MEASURING TESTING

Shigeru Matsui

Person

Patents Grantslast 30 patents

Curved grating, method for manufacturing the same, and optical device

Curved face diffraction grating fabrication method, curved face dif...

Surface profile measurement method and device used therein

Phase shift mask, method of forming asymmetric pattern, method of m...

Light source device, surface inspecting apparatus using the device,...

Surface inspecting apparatus and surface inspecting method

Surface defect inspection method and apparatus

Optical inspection method and optical inspection apparatus

Inspection apparatus

Method for detecting particles and defects and inspection equipment...

Light source device, surface inspecting apparatus using the device,...

Appearance inspection apparatus

Method for detecting particles and defects and inspection equipment...

Inspection apparatus

Surface inspecting apparatus and surface inspecting method

Appearance inspection apparatus

Surface defect inspection method and apparatus

Surface inspection method and surface inspection apparatus

Capillary electrophoresis apparatus and electrophoresis method

Surface inspection method and surface inspection apparatus

Optical inspection method and optical inspection apparatus

Appearance inspection apparatus

Surface inspection method and surface inspection apparatus

Method for detecting particles and defects and inspection equipment...

Surface defect inspection method and apparatus

Optical inspection method and optical inspection apparatus

Optical inspection method and optical inspection apparatus

Surface inspection method and inspecting device using the same

Surface inspection method and surface inspection apparatus

Surface inspection method and surface inspection apparatus

Patents Applicationslast 30 patents

Curved Grating, Method for Manufacturing the Same, and Optical Device

Surface Profile Measurement Method and Device Used Therein

CURVED FACE DIFFRACTION GRATING FABRICATION METHOD, CURVED FACE DIF...

PHASE SHIFT MASK, METHOD OF FORMING ASYMMETRIC PATTERN, METHOD OF M...

LIGHT SOURCE DEVICE, SURFACE INSPECTING APPARATUS USING THE DEVICE,...

SURFACE DEFECT INSPECTION METHOD AND APPARATUS

DIFFRACTION GRATING MANUFACTURING METHOD, SPECTROPHOTOMETER, AND SE...

SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD

INSPECTION APPARATUS

Appearance Inspection Apparatus

SPECTROPHOTOMETER

SURFACE DEFECT INSPECTION METHOD AND APPARATUS

SPECTROPHOTOMETER

OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS

Appearance Inspection Apparatus

SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS

SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD

SURFACE DEFECT INSPECTION METHOD AND APPARATUS

OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS

Surface Inspection Method and Surface Inspection Apparatus

LIGHT SOURCE DEVICE, SURFACE INSPECTING APPARATUS USING THE DEVICE,...

SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS

Surface Inspection Method and Surface Inspection Apparatus

SURFACE DEFECT INSPECTION METHOD AND APPARATUS

Appearance Inspection Apparatus

OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS

Surface Inspection Method and Surface Inspection Apparatus

SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS

PATTERN DEFECT INSPECTION METHOD AND APPARATUS

METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT...