Shigeru Matsuno

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for roughening substrate surface and method for manufacturin...
- Patent number 8,652,869
- Issue date Feb 18, 2014
- Mitsubishi Electric Corporation
- Kunihiko Nishimura
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Wire electric discharge machining method, semiconductor wafer manuf...
- Patent number 8,138,442
- Issue date Mar 20, 2012
- Mitsubishi Electric Corporation
- Tatsushi Sato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing photovoltaic device
- Patent number 8,039,396
- Issue date Oct 18, 2011
- Mitsubishi Electric Corporation
- Kunihiko Nishimura
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Liquid substance supply device for vaporizing system, vaporizer, va...
- Patent number 7,731,162
- Issue date Jun 8, 2010
- Shimadzu Corporation
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid substance supply device for vaporizing system, vaporizer, va...
- Patent number 7,637,482
- Issue date Dec 29, 2009
- Shimadzu Corporation
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid substance supply device for vaporizing system, vaporizer, va...
- Patent number 7,422,198
- Issue date Sep 9, 2008
- Shimadzu Corporation
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid substance supply device for vaporizing system, vaporizer, an...
- Patent number 7,163,197
- Issue date Jan 16, 2007
- Shimadzu Corporation
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal electrode and bonding method using the metal electrode
- Patent number 7,078,330
- Issue date Jul 18, 2006
- Mitsubishi Denki Kabushiki Kaisha
- Akira Maeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polarization dispersion compensating apparatus
- Patent number 6,882,760
- Issue date Apr 19, 2005
- Mitsubishi Denki Kabushiki Kaisha
- Masakazu Takabayashi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Variable dispersion compensator
- Patent number 6,810,179
- Issue date Oct 26, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Takuya Ohira
- G02 - OPTICS
Information Patent Grant
PMD compensating apparatus for controlling polarization controller...
- Patent number 6,807,322
- Issue date Oct 19, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Masakazu Takabayashi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method of manufacturing grating
- Patent number 6,690,860
- Issue date Feb 10, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Sadayuki Matsumoto
- G02 - OPTICS
Information Patent Grant
Temperature control system for a grating
- Patent number 6,643,430
- Issue date Nov 4, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Sadayuki Matsumoto
- G02 - OPTICS
Information Patent Grant
Chemical vapor deposition apparatus and a method of manufacturing a...
- Patent number 6,638,880
- Issue date Oct 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD source material for forming an electrode, and electrode and wir...
- Patent number 6,512,297
- Issue date Jan 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Shigeru Matsuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for chemical vapor deposition apparatus, chemical vapor d...
- Patent number 6,470,144
- Issue date Oct 22, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Masayoshi Tarutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high dielectric constant thin film and method of...
- Patent number 6,448,191
- Issue date Sep 10, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus and a method of manufacturing a...
- Patent number 6,312,526
- Issue date Nov 6, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizing device for CVD source materials and CVD apparatus employ...
- Patent number 6,273,957
- Issue date Aug 14, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitor
- Patent number 6,236,559
- Issue date May 22, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Fusaoki Uchikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high dielectric constant thin film and method of...
- Patent number 6,235,649
- Issue date May 22, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition source for depositing lead zirconate tita...
- Patent number 6,231,658
- Issue date May 15, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Fusaoki Uchikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitor including barium strontium titanate film
- Patent number 6,212,059
- Issue date Apr 3, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Fusaoki Uchikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD method for forming oxide-system dielectric thin film
- Patent number 6,103,002
- Issue date Aug 15, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Fusaoki Uchikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD method for forming oxide-system dielectric thin film
- Patent number 6,063,443
- Issue date May 16, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Fusaoki Uchikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD Raw Material for oxide-system dielectric thin film and capacito...
- Patent number 5,555,154
- Issue date Sep 10, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Fusaoki Uchikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing an oxide-system dielectric thin film using...
- Patent number 5,372,850
- Issue date Dec 13, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Fusaoki Uchikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma based method for production of superconductive oxide layers
- Patent number 5,034,372
- Issue date Jul 23, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Shigeru Matsuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SOLAR BATTERY MODULE, PHOTOVOLTAIC APPARATUS, AND MANUFACTURING MET...
- Publication number 20130206210
- Publication date Aug 15, 2013
- Mitsubishi Electric Corporation
- Daisuke Niinobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ROUGHENING SUBSTRATE SURFACE, METHOD FOR MANUFACTURING P...
- Publication number 20120097239
- Publication date Apr 26, 2012
- Mitsubishi Electric Corporation
- Takehiko Sato
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SOLAR BATTERY CELL AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120037224
- Publication date Feb 16, 2012
- Mitsubishi Electric Corporation
- Masahiro Fujikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD FOR ROUGHENING SUBSTRATE SURFACE AND METHOD FOR MANUFACTURIN...
- Publication number 20120015470
- Publication date Jan 19, 2012
- Mitsubishi Electric Corporation
- Kunihiko Nishimura
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD FOR MANUFACTURING PHOTOVOLTAIC DEVICE
- Publication number 20100120188
- Publication date May 13, 2010
- MITSUBISHI ELECTRIC CORPORATION
- Kunihiko Nishimura
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
WIRE ELECTRIC DISCHARGE MACHINING METHOD, SEMICONDUCTOR WAFER MANUF...
- Publication number 20090212026
- Publication date Aug 27, 2009
- Mitsubishi Electric Corporation
- Tatsushi Sato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Liquid substance supply device for vaporizing system, vaporizer, va...
- Publication number 20090045531
- Publication date Feb 19, 2009
- Shimadzu Corporation
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid substance supply device for vaporizing system, vaporizer, va...
- Publication number 20080295770
- Publication date Dec 4, 2008
- Shimadzu Corporation
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for Film Production and Semiconductor Device Utilizing Film...
- Publication number 20080038585
- Publication date Feb 14, 2008
- MITSUBISHI ELECTRIC CORPORATION
- Teruhiko Kumada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Cvd Device
- Publication number 20080029027
- Publication date Feb 7, 2008
- MITSUBISHI ELECTRIC CORPORATION
- Teruhiko Kumada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid substance supply device for vaporizing system, vaporizer, va...
- Publication number 20070085226
- Publication date Apr 19, 2007
- Shimadzu Corporation
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Infrared inspection apparatus, infrared inspecting method and manuf...
- Publication number 20060278831
- Publication date Dec 14, 2006
- Mitsubishi Denki Kabushiki Kaisha
- Norihisa Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
Metal electrode and bonding method using the metal electrode
- Publication number 20040175917
- Publication date Sep 9, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Akira Maeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polarization dispersion compensating apparatus
- Publication number 20040101227
- Publication date May 27, 2004
- Masakazu Takabayashi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Variable dispersion compensator
- Publication number 20030228103
- Publication date Dec 11, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Takuya Ohira
- G02 - OPTICS
Information Patent Application
PMD compensating apparatus for controlling polarization controller...
- Publication number 20030165284
- Publication date Sep 4, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Masakazu Takabayashi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Temperature control system for a grating
- Publication number 20020114570
- Publication date Aug 22, 2002
- Sadayuki Matsumoto
- G02 - OPTICS
Information Patent Application
Method of manufacturing grating
- Publication number 20020081068
- Publication date Jun 27, 2002
- Sadayuki Matsumoto
- G02 - OPTICS
Information Patent Application
Liquid substance supply device for vaporizing system, vaporizer, an...
- Publication number 20020043215
- Publication date Apr 18, 2002
- Naoki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical vapor deposition apparatus and a method of manufacturing a...
- Publication number 20020023588
- Publication date Feb 28, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD SOURCE MATERIAL FOR FORMING AN ELECTRODE, AND ELECTRODE AND WIR...
- Publication number 20010050391
- Publication date Dec 13, 2001
- SHIGERU MATSUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizing device for CVD source materials and CVD apparatus employ...
- Publication number 20010039923
- Publication date Nov 15, 2001
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming high dielectric constant thin film and method of...
- Publication number 20010029090
- Publication date Oct 11, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shigeru Matsuno

Person

Patents Grantslast 30 patents

Method for roughening substrate surface and method for manufacturin...

Wire electric discharge machining method, semiconductor wafer manuf...

Method for manufacturing photovoltaic device

Liquid substance supply device for vaporizing system, vaporizer, va...

Liquid substance supply device for vaporizing system, vaporizer, va...

Liquid substance supply device for vaporizing system, vaporizer, va...

Liquid substance supply device for vaporizing system, vaporizer, an...

Metal electrode and bonding method using the metal electrode

Polarization dispersion compensating apparatus

Variable dispersion compensator

PMD compensating apparatus for controlling polarization controller...

Method of manufacturing grating

Temperature control system for a grating

Chemical vapor deposition apparatus and a method of manufacturing a...

CVD source material for forming an electrode, and electrode and wir...

Vaporizer for chemical vapor deposition apparatus, chemical vapor d...

Method of forming high dielectric constant thin film and method of...

Chemical vapor deposition apparatus and a method of manufacturing a...

Vaporizing device for CVD source materials and CVD apparatus employ...

Capacitor

Method of forming high dielectric constant thin film and method of...

Chemical vapor deposition source for depositing lead zirconate tita...

Capacitor including barium strontium titanate film

CVD method for forming oxide-system dielectric thin film

CVD method for forming oxide-system dielectric thin film

CVD Raw Material for oxide-system dielectric thin film and capacito...

Method of manufacturing an oxide-system dielectric thin film using...

Plasma based method for production of superconductive oxide layers

Patents Applicationslast 30 patents

SOLAR BATTERY MODULE, PHOTOVOLTAIC APPARATUS, AND MANUFACTURING MET...

METHOD FOR ROUGHENING SUBSTRATE SURFACE, METHOD FOR MANUFACTURING P...

SOLAR BATTERY CELL AND METHOD OF MANUFACTURING THE SAME

METHOD FOR ROUGHENING SUBSTRATE SURFACE AND METHOD FOR MANUFACTURIN...

METHOD FOR MANUFACTURING PHOTOVOLTAIC DEVICE

WIRE ELECTRIC DISCHARGE MACHINING METHOD, SEMICONDUCTOR WAFER MANUF...

Liquid substance supply device for vaporizing system, vaporizer, va...

Liquid substance supply device for vaporizing system, vaporizer, va...

Process for Film Production and Semiconductor Device Utilizing Film...

Plasma Cvd Device

Liquid substance supply device for vaporizing system, vaporizer, va...

Infrared inspection apparatus, infrared inspecting method and manuf...

Metal electrode and bonding method using the metal electrode

Polarization dispersion compensating apparatus

Variable dispersion compensator

PMD compensating apparatus for controlling polarization controller...

Temperature control system for a grating

Method of manufacturing grating

Liquid substance supply device for vaporizing system, vaporizer, an...

Chemical vapor deposition apparatus and a method of manufacturing a...

CVD SOURCE MATERIAL FOR FORMING AN ELECTRODE, AND ELECTRODE AND WIR...

Vaporizing device for CVD source materials and CVD apparatus employ...

Method of forming high dielectric constant thin film and method of...