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Shigeru Mizuno
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Delmar, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Radiation-assisted selective deposition of metal-containing cap layers
Patent number
8,716,132
Issue date
May 6, 2014
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Diffusion barrier for integrated circuits formed from a layer of re...
Patent number
8,372,739
Issue date
Feb 12, 2013
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of metal-containing cap layers for semiconduct...
Patent number
8,242,019
Issue date
Aug 14, 2012
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for multi-step copper plating on a continuous ruthenium fil...
Patent number
8,076,241
Issue date
Dec 13, 2011
Tokyo Electron Limited
Frank M. Cerio, Jr.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Diffusion barrier and adhesion layer for an interconnect structure
Patent number
8,058,728
Issue date
Nov 15, 2011
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device containing an aluminum tantalum carbonitride b...
Patent number
8,026,168
Issue date
Sep 27, 2011
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for improving sidewall coverage in a deposition s...
Patent number
7,935,393
Issue date
May 3, 2011
Tokyo Electron Limited
Shigeru Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming cobalt nitride cap layers
Patent number
7,846,841
Issue date
Dec 7, 2010
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a ruthenium metal cap layer
Patent number
7,799,681
Issue date
Sep 21, 2010
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a diffusion barrier and adhesion layer for an int...
Patent number
7,727,883
Issue date
Jun 1, 2010
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming cobalt tungsten cap layers
Patent number
7,718,527
Issue date
May 18, 2010
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sequential tantalum-nitride deposition
Patent number
7,642,201
Issue date
Jan 5, 2010
Tokyo Electron Limited
Frank M. Cerio, Jr.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHODS FOR MULTI-STEP COPPER PLATING ON A CONTINUOUS RUTHENIUM FIL...
Publication number
20110076390
Publication date
Mar 31, 2011
TOKYO ELECTRON LIMITED
Frank M. Cerio, JR.
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SELECTIVE DEPOSITION OF METAL-CONTAINING CAP LAYERS FOR SEMICONDUCT...
Publication number
20100248473
Publication date
Sep 30, 2010
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIATION-ASSISTED SELECTIVE DEPOSITION OF METAL-CONTAINING CAP LAYERS
Publication number
20100210108
Publication date
Aug 19, 2010
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING RUTHENIUM METAL CAP LAYERS
Publication number
20100081274
Publication date
Apr 1, 2010
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING COBALT NITRIDE CAP LAYERS
Publication number
20100081275
Publication date
Apr 1, 2010
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING COBALT TUNGSTEN CAP LAYERS
Publication number
20100081276
Publication date
Apr 1, 2010
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A DIFFUSION BARRIER AND ADHESION LAYER FOR AN INT...
Publication number
20100081271
Publication date
Apr 1, 2010
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIFFUSION BARRIER AND ADHESION LAYER FOR AN INTERCONNECT STRUCTURE
Publication number
20100078818
Publication date
Apr 1, 2010
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A RUTHENIUM METAL CAP LAYER
Publication number
20100015798
Publication date
Jan 21, 2010
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A COBALT METAL NITRIDE BARRIER FILM
Publication number
20090246952
Publication date
Oct 1, 2009
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEQUENTIAL TANTALUM-NITRIDE DEPOSITION
Publication number
20090191721
Publication date
Jul 30, 2009
TOKYO ELECTRON LIMITED
Frank M. Cerio, JR.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE CONTAINING AN ALUMINUM TANTALUM CARBONITRIDE B...
Publication number
20090045514
Publication date
Feb 19, 2009
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR IMPROVING SIDEWALL COVERAGE IN A DEPOSITION S...
Publication number
20090041950
Publication date
Feb 12, 2009
TOKYO ELECTRON LIMITED
SHIGERU MIZUNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIFFUSION BARRIER FOR INTEGRATED CIRCUITS FORMED FROM A LAYER OF RE...
Publication number
20080237859
Publication date
Oct 2, 2008
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS