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Shigeru Mizuno

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Patents Grantslast 30 patents

  • Information Patent Grant

    Magnetron sputtering apparatus and film forming method
    • Patent number 8,956,512
    • Issue date Feb 17, 2015
    • Tokyo Electron Limited
    • Shigeru Mizuno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Magnetron sputtering apparatus
    • Patent number 8,617,363
    • Issue date Dec 31, 2013
    • Tokyo Electron Limited
    • Shigeru Mizuno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    MAGNETRON SPUTTERING APPARATUS AND FILM FORMING METHOD
    • Publication number 20130186743
    • Publication date Jul 25, 2013
    • TOKYO ELECTRON LIMITED
    • Shigeru MIZUNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MAGNETRON SPUTTERING APPARATUS
    • Publication number 20130105309
    • Publication date May 2, 2013
    • TOKYO ELECTRON LIMITED
    • Shigeru Mizuno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MAGNETRON SPUTTERING APPARATUS AND METHOD
    • Publication number 20130081938
    • Publication date Apr 4, 2013
    • Shigeru MIZUNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...