Shigeru Moriya

Follow

Person

Isehara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming resist micropattern
- Patent number 4,634,645
- Issue date Jan 6, 1987
- Nippon Telegraph & Telephone Corporation
- Tadahito Matsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY