Shigeru Moriya

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mask, method of producing mask, and method of producing semiconduct...
- Patent number 7,556,895
- Issue date Jul 7, 2009
- Sony Corporation
- Shigeru Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask, exposure method and production method of semiconductor device
- Patent number 7,517,618
- Issue date Apr 14, 2009
- Sony Corporation
- Shigeru Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device, exposure method, and semiconductor device manufact...
- Patent number 7,456,031
- Issue date Nov 25, 2008
- Sony Corporation
- Shinji Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure method and semiconductor device produc...
- Patent number 7,326,940
- Issue date Feb 5, 2008
- Sony Corporation
- Shigeru Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask-making member and its production method, mask and its making m...
- Patent number 7,220,975
- Issue date May 22, 2007
- Sony Corporation
- Kaoru Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask, method of producing mask, and method of producing semiconduct...
- Patent number 7,144,178
- Issue date Dec 5, 2006
- Sony Corporation
- Shigeru Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask-making member and its production method, mask and its making m...
- Patent number 7,126,231
- Issue date Oct 24, 2006
- Sony Corporation
- Kaoru Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pattern correction method, semiconductor device manufacturing...
- Patent number 7,109,500
- Issue date Sep 19, 2006
- Sony Corporation
- Shinji Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask-making member and its production method, mask and its making m...
- Patent number 7,102,243
- Issue date Sep 5, 2006
- Sony Corporation
- Kaoru Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask, method of producing mask, and method of producing semiconduct...
- Patent number 7,060,996
- Issue date Jun 13, 2006
- Sony Corporation
- Shigeru Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask, method of producing mask, and method of producing semiconduct...
- Patent number 7,057,300
- Issue date Jun 6, 2006
- Sony Corporation
- Shigeru Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask and method for making the same, and method for making semicond...
- Patent number 6,955,993
- Issue date Oct 18, 2005
- Sony Corporation
- Shinji Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask for fabrication of semiconductor devices, process for producti...
- Patent number 6,916,582
- Issue date Jul 12, 2005
- Sony Corporation
- Masaki Yoshizawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and production method therefor and production method for semic...
- Patent number 6,787,785
- Issue date Sep 7, 2004
- Sony Corporation
- Shigeru Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of lithography utilizing orthogonal experiment to improve pr...
- Patent number 6,548,214
- Issue date Apr 15, 2003
- Sony Corporation
- Noritsugu Yoshizawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of computing defocus amount in lithography and lithographic...
- Patent number 6,473,162
- Issue date Oct 29, 2002
- Sony Corporation
- Yoshizawa Masaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MASK-MAKING MEMBER AND ITS PRODUCTION METHOD, MASK AND ITS MAKING M...
- Publication number 20070114450
- Publication date May 24, 2007
- Kaoru Koike
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask, method of producing mask, and method of producing semiconduct...
- Publication number 20070054202
- Publication date Mar 8, 2007
- SONY CORPORATION
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask, method of producing mask, and method of producing semiconduct...
- Publication number 20070054203
- Publication date Mar 8, 2007
- SONY CORPORATION
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure device, exposure method, and semiconductor device manufact...
- Publication number 20060151710
- Publication date Jul 13, 2006
- Shinji Omori
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask-making member and its production method, mask and its making m...
- Publication number 20050174553
- Publication date Aug 11, 2005
- Kaoru Koike
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask, exposure method and production method of semiconductor device
- Publication number 20050170265
- Publication date Aug 4, 2005
- Sony Corporation
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask, semiconductor device manufacturing method, and semiconductor...
- Publication number 20050145892
- Publication date Jul 7, 2005
- SONY CORPORATION
- Shinichiro Nohdo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask, method of production of same, and method of production of sem...
- Publication number 20050142462
- Publication date Jun 30, 2005
- Sony Corporation
- Shinji Omori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method and semiconductor device produc...
- Publication number 20050133734
- Publication date Jun 23, 2005
- Sony Corporation
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask pattern correction method, semiconductor device manufacturing...
- Publication number 20050124078
- Publication date Jun 9, 2005
- Sony Corp.
- Shinji Omori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask and method for making the same, and method for making semicond...
- Publication number 20040217435
- Publication date Nov 4, 2004
- Shinki Omori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask, method of producing mask, and method of producing semiconduct...
- Publication number 20040209174
- Publication date Oct 21, 2004
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask, method of producing mask, and method of producing semiconduct...
- Publication number 20040209175
- Publication date Oct 21, 2004
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask-making member and its production method, mask and its making m...
- Publication number 20040096755
- Publication date May 20, 2004
- Kaoru Koike
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask, method of producing mask, and method of producing semiconduct...
- Publication number 20040086790
- Publication date May 6, 2004
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask and production method therefor and production method for semic...
- Publication number 20030137024
- Publication date Jul 24, 2003
- Shigeru Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask for fabrication of semiconductor devices, process for producti...
- Publication number 20030010749
- Publication date Jan 16, 2003
- Masaki Yoshizawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask-making member and its production method, mask and its making m...
- Publication number 20020130425
- Publication date Sep 19, 2002
- Kaoru Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of lithography
- Publication number 20020051127
- Publication date May 2, 2002
- Noritsugu Yoshizawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shigeru Moriya

Person

Patents Grantslast 30 patents

Mask, method of producing mask, and method of producing semiconduct...

Mask, exposure method and production method of semiconductor device

Exposure device, exposure method, and semiconductor device manufact...

Exposure apparatus, exposure method and semiconductor device produc...

Mask-making member and its production method, mask and its making m...

Mask, method of producing mask, and method of producing semiconduct...

Mask-making member and its production method, mask and its making m...

Mask pattern correction method, semiconductor device manufacturing...

Mask-making member and its production method, mask and its making m...

Mask, method of producing mask, and method of producing semiconduct...

Mask, method of producing mask, and method of producing semiconduct...

Mask and method for making the same, and method for making semicond...

Mask for fabrication of semiconductor devices, process for producti...

Mask and production method therefor and production method for semic...

Method of lithography utilizing orthogonal experiment to improve pr...

Method of computing defocus amount in lithography and lithographic...

Patents Applicationslast 30 patents

MASK-MAKING MEMBER AND ITS PRODUCTION METHOD, MASK AND ITS MAKING M...

Mask, method of producing mask, and method of producing semiconduct...

Mask, method of producing mask, and method of producing semiconduct...

Exposure device, exposure method, and semiconductor device manufact...

Mask-making member and its production method, mask and its making m...

Mask, exposure method and production method of semiconductor device

Mask, semiconductor device manufacturing method, and semiconductor...

Mask, method of production of same, and method of production of sem...

Exposure apparatus, exposure method and semiconductor device produc...

Mask pattern correction method, semiconductor device manufacturing...

Mask and method for making the same, and method for making semicond...

Mask, method of producing mask, and method of producing semiconduct...

Mask, method of producing mask, and method of producing semiconduct...

Mask-making member and its production method, mask and its making m...

Mask, method of producing mask, and method of producing semiconduct...

Mask and production method therefor and production method for semic...

Mask for fabrication of semiconductor devices, process for producti...

Mask-making member and its production method, mask and its making m...

Method of lithography