Shigeru Nagano

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Campbell, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Matching optical metrology tools using hypothetical profiles
- Patent number 7,446,887
- Issue date Nov 4, 2008
- Tokyo Electron Limited
- Fred Stanke
- G01 - MEASURING TESTING
Information Patent Grant
Matching optical metrology tools using diffraction signals
- Patent number 7,446,888
- Issue date Nov 4, 2008
- Tokyo Electron Limited
- Fred Stanke
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Matching optical metrology tools using hypothetical profiles
- Publication number 20070268497
- Publication date Nov 22, 2007
- TOKYO ELECTRON LIMITED
- Fred Stanke
- G01 - MEASURING TESTING
Information Patent Application
Matching optical metrology tools using diffraction signals
- Publication number 20070268498
- Publication date Nov 22, 2007
- TOKYO ELECTRON LIMITED
- Fred Stanke
- G01 - MEASURING TESTING