Shigeru NAKATSUKA

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Yokkaichi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Deposition apparatus including an off-axis lift-and-rotation unit a...
- Patent number 11,598,005
- Issue date Mar 7, 2023
- SanDisk Technologies LLC
- Shoichi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone plasma-enhanced chemical vapor deposition apparatus and...
- Patent number 11,551,961
- Issue date Jan 10, 2023
- SanDisk Technologies LLC
- Shoichi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone plasma-enhanced chemical vapor deposition apparatus and...
- Patent number 11,538,708
- Issue date Dec 27, 2022
- SanDisk Technologies LLC
- Shoichi Murakami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ANISOTROPIC ETCH APPARATUS WITH LOCAL ETCH DIRECTION ADJUSTMENT CAP...
- Publication number 20210391154
- Publication date Dec 16, 2021
- SANDISK TECHNOLOGIES LLC
- Syo FUKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS INCLUDING AN OFF-AXIS LIFT-AND-ROTATION UNIT A...
- Publication number 20210348272
- Publication date Nov 11, 2021
- SANDISK TECHNOLOGIES LLC
- Shoichi MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND...
- Publication number 20210351059
- Publication date Nov 11, 2021
- SANDISK TECHNOLOGIES LLC
- Shoichi MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND...
- Publication number 20210351058
- Publication date Nov 11, 2021
- SANDISK TECHNOLOGIES LLC
- Shoichi MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS