Shigeru Noguchi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus for phase shift mask
- Patent number 6,879,393
- Issue date Apr 12, 2005
- Dai Nippon Printing Co., Ltd.
- Yasuhiro Koizumi
- G01 - MEASURING TESTING
Information Patent Grant
Method for exposing a pattern plate having an alignment pattern and...
- Patent number 5,543,256
- Issue date Aug 6, 1996
- Dai Nippon Printing Co., Ltd.
- Toshiki Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focused ion beam irradiating apparatus
- Patent number 5,164,596
- Issue date Nov 17, 1992
- Dai Nippon Printing
- Shigeru Noguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection method and device for an aperture in a focused ion beam...
- Patent number 5,061,851
- Issue date Oct 29, 1991
- Dai Nippon Insatsu Kabushiki Kaisha
- Shigeru Noguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Defect inspection apparatus for phase shift mask
- Publication number 20020036772
- Publication date Mar 28, 2002
- Yasuhiro Koizumi
- G01 - MEASURING TESTING