Shigeru Odagiri

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer polishing method and apparatus
- Patent number RE37622
- Issue date Apr 2, 2002
- SpeedFam-IPEC Corporation
- Chris E. Karlsrud
- 451 - Abrading
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,196
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,199
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,329,732
- Issue date Jul 19, 1994
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING