Shigeru Sakuma

Person

Chigasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing optical member
- Patent number 6,994,747
- Issue date Feb 7, 2006
- Nikon Corporation
- Hiroyuki Hiraiwa
- G02 - OPTICS
Information Patent Grant
Manufacturing method for calcium fluoride and calcium fluoride for...
- Patent number 6,811,606
- Issue date Nov 2, 2004
- Nikon Corporation
- Shigeru Sakuma
- G02 - OPTICS
Information Patent Grant
Optical member for photolithography and method for evaluating the same
- Patent number 6,782,074
- Issue date Aug 24, 2004
- Nikon Corporation
- Shigeru Sakuma
- C30 - CRYSTAL GROWTH
Information Patent Grant
OPTICAL ELEMENT MADE FROM FLUORIDE SINGLE CRYSTAL, METHOD FOR MANUF...
- Patent number 6,411,384
- Issue date Jun 25, 2002
- Nikon Corporation
- Shigeru Sakuma
- G02 - OPTICS
Information Patent Grant
Optical member for photolithography and photolithography apparatus
- Patent number 6,377,332
- Issue date Apr 23, 2002
- Nikon Corporation
- Shigeru Sakuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Manufacturing method for calcium fluoride and calcium fluoride for...
- Patent number 6,332,922
- Issue date Dec 25, 2001
- Nikon Corporation
- Shigeru Sakuma
- C30 - CRYSTAL GROWTH
Information Patent Grant
Optical element made from fluoride single crystal, method for manuf...
- Patent number 6,201,634
- Issue date Mar 13, 2001
- Nikon Corporation
- Shigeru Sakuma
- G02 - OPTICS
Information Patent Grant
Image-focusing optical system for ultraviolet laser
- Patent number 6,061,174
- Issue date May 9, 2000
- Nikon Corporation
- Masaki Shiozawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Projection exposure apparatus
- Patent number 5,978,070
- Issue date Nov 2, 1999
- Nikon Corporation
- Shigeru Sakuma
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Method for manufacturing an optical member formed of a fluoride cry...
- Publication number 20040237880
- Publication date Dec 2, 2004
- Nikon Corporation
- Shigeru Sakuma
- G02 - OPTICS
Information Patent Application
Fluoride crystal material for optical element to be used for photol...
- Publication number 20040223212
- Publication date Nov 11, 2004
- Nikon Corporation
- Shigeru Sakuma
- C30 - CRYSTAL GROWTH
Information Patent Application
Optical member for photolithography and method for evaluating the same
- Publication number 20030112501
- Publication date Jun 19, 2003
- Nikon Corporation
- Shigeru Sakuma
- C30 - CRYSTAL GROWTH
Information Patent Application
Manufacturing method for calcium fluoride and calcium fluoride for...
- Publication number 20020038625
- Publication date Apr 4, 2002
- NIKON CORPORATION
- Shigeru Sakuma
- C30 - CRYSTAL GROWTH
Information Patent Application
Optical element made from fluoride single crystal, method for manuf...
- Publication number 20010024314
- Publication date Sep 27, 2001
- NIKON CORPORATION
- Shigeru Sakuma
- G02 - OPTICS

Shigeru Sakuma

Person

Patents Grantslast 30 patents

Method for producing optical member

Manufacturing method for calcium fluoride and calcium fluoride for...

Optical member for photolithography and method for evaluating the same

OPTICAL ELEMENT MADE FROM FLUORIDE SINGLE CRYSTAL, METHOD FOR MANUF...

Optical member for photolithography and photolithography apparatus

Manufacturing method for calcium fluoride and calcium fluoride for...

Optical element made from fluoride single crystal, method for manuf...

Image-focusing optical system for ultraviolet laser

Projection exposure apparatus

Patents Applicationslast 30 patents

Method for manufacturing an optical member formed of a fluoride cry...

Fluoride crystal material for optical element to be used for photol...

Optical member for photolithography and method for evaluating the same

Manufacturing method for calcium fluoride and calcium fluoride for...

Optical element made from fluoride single crystal, method for manuf...