Shigeru Serikawa

Person

Nakai, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical inspection method and its apparatus
- Patent number 8,781,758
- Issue date Jul 15, 2014
- Hitachi High-Technologies Corporation
- Shigeru Serikawa
- G11 - INFORMATION STORAGE
Information Patent Grant
Method for defect determination in fine concave-convex pattern and...
- Patent number 8,638,430
- Issue date Jan 28, 2014
- Hitachi High-Technologies Corporation
- Hideaki Sasazawa
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry method and device for inspecting patterned medium
- Patent number 8,411,928
- Issue date Apr 2, 2013
- Hitachi High-Technologies Corporation
- Hideaki Sasazawa
- G11 - INFORMATION STORAGE
Information Patent Grant
Disk surface inspection apparatus, inspection system thereof, and i...
- Patent number 8,253,935
- Issue date Aug 28, 2012
- Hitachi High-Technologies Corporation
- Tatsuo Hariyama
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspecting apparatus with defect detection optical s...
- Patent number 8,018,585
- Issue date Sep 13, 2011
- Hitachi High-Technologies Corporation
- Tatsuo Hariyama
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for detecting shape of surface of medium
- Patent number 7,969,567
- Issue date Jun 28, 2011
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for detecting defects on a disk surface
- Patent number 7,898,652
- Issue date Mar 1, 2011
- Hitachi High-Technologies Corporation
- Tatsuo Hariyama
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring heterodyne optical interference...
- Patent number 7,612,888
- Issue date Nov 3, 2009
- Hitachi High-Technologies Corporation
- Shigeru Serikawa
- G01 - MEASURING TESTING
Information Patent Grant
Interference detecting system for use in interferometer
- Patent number 6,295,131
- Issue date Sep 25, 2001
- Hitachi Electronics Engineering Co., Ltd.
- Tuneo Yamaba
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MAGNETIC DISK INSPECTION DEVICE AND MAGNETIC DISK INSPECTION METHOD
- Publication number 20160216216
- Publication date Jul 28, 2016
- HITACHI HIGH-TECH FINE SYSTEMS CORPORATION
- Shigeru SERIKAWA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEF...
- Publication number 20140071442
- Publication date Mar 13, 2014
- Hitachi High-Technologies Corporation
- Shigeru SERIKAWA
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTING APPARATUS HAVING DOUBLE RECIPE PROCESSING FUNCTION
- Publication number 20140043603
- Publication date Feb 13, 2014
- Hitachi High-Technologies Corporation
- Yu YANAKA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEF...
- Publication number 20130286386
- Publication date Oct 31, 2013
- Hitachi High-Technologies Corporation
- Shigeru SERIKAWA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING SURFACE OF A SAMPLE
- Publication number 20130258327
- Publication date Oct 3, 2013
- Hitachi High-Technologies Corporation
- Yu KUSAKA
- G01 - MEASURING TESTING
Information Patent Application
DISK SURFACE INSPECTION METHOD AND DISK SURFACE INSPECTION DEVICE
- Publication number 20130258328
- Publication date Oct 3, 2013
- Hitachi High-Technologies Corporation
- Nobuyuki SUGIMOTO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SURFACE DEFECT INSPECTION METHOD AND INSPECTION DEVICE
- Publication number 20130077092
- Publication date Mar 28, 2013
- Hitachi High-Technologies Corporation
- Hideaki SASAZAWA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND DEVICE FOR SAME
- Publication number 20120320367
- Publication date Dec 20, 2012
- Hitachi High-Technologies Corporation
- Yu Yanaka
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION METHOD AND DEVICE FOR SAME
- Publication number 20120287426
- Publication date Nov 15, 2012
- Hideaki Sasazawa
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INSPECTION METHOD AND ITS APPARATUS
- Publication number 20120046885
- Publication date Feb 23, 2012
- Hitachi High-Technologies Corporation
- Shigeru SERIKAWA
- G01 - MEASURING TESTING
Information Patent Application
PATTERN SHAPE INSPECTION INSTRUMENT AND PATTERN SHAPE INSPECTION ME...
- Publication number 20110272096
- Publication date Nov 10, 2011
- Hitachi High-Technologies Corporation
- Shigeru SERIKAWA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DEFECT DETERMINATION IN FINE CONCAVE-CONVEX PATTERN AND...
- Publication number 20110001962
- Publication date Jan 6, 2011
- Hitachi High-Technologies Corporation
- Hideaki Sasazawa
- G01 - MEASURING TESTING
Information Patent Application
DISK SURFACE DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20100246356
- Publication date Sep 30, 2010
- Hitachi High-Technologies Corporation
- Bin Abdulrashid FARIZ
- G01 - MEASURING TESTING
Information Patent Application
DISK SURFACE INSPECTION APPARATUS, INSPECTION SYSTEM THEREOF, AND I...
- Publication number 20100201975
- Publication date Aug 12, 2010
- Tatsuo HARIYAMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR INSPECTING PATTERNED MEDIUM
- Publication number 20100098320
- Publication date Apr 22, 2010
- Hitachi High-Technologies Corporation
- Hideaki SASAZAWA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR DETECTING SHAPE OF SURFACE OF MEDIUM
- Publication number 20100085855
- Publication date Apr 8, 2010
- Hitachi High-Technologies Corporation
- Minoru YOSHIDA
- G11 - INFORMATION STORAGE
Information Patent Application
SURFACE DEFECT INSPECTING APPARATUS WITH DEFECT DETECTION OPTICAL S...
- Publication number 20090237669
- Publication date Sep 24, 2009
- Tatsuo HARIYAMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS ON A DISK SURFACE
- Publication number 20090190123
- Publication date Jul 30, 2009
- Tatsuo HARIYAMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING A SURFACE OF A SPECIMEN
- Publication number 20080239904
- Publication date Oct 2, 2008
- Minoru YOSHIDA
- G11 - INFORMATION STORAGE
Information Patent Application
OPTICAL SYSTEM OF DETECTING PERIPHERAL SURFACE DEFECT OF GLASS DISK...
- Publication number 20080088830
- Publication date Apr 17, 2008
- Shigeru SERIKAWA
- G01 - MEASURING TESTING
Information Patent Application
DETECTION METHOD OF PERIPHERAL SURFACE DEFECT OF DISK AND DETECTION...
- Publication number 20080080346
- Publication date Apr 3, 2008
- Shigeru SERIKAWA
- G11 - INFORMATION STORAGE
Information Patent Application
TESTING METHOD FOR SURFACE DEFECTS ON DISC AND TESTING APPARATUS FO...
- Publication number 20070222975
- Publication date Sep 27, 2007
- SHIGERU SERIKAWA
- G01 - MEASURING TESTING
Information Patent Application
MEASURING METHOD OF OPTICAL HETERODYNE INTERFERENCE AND A MEASURING...
- Publication number 20070206198
- Publication date Sep 6, 2007
- Shigeru Serikawa
- G01 - MEASURING TESTING

Shigeru Serikawa

Person

Patents Grantslast 30 patents

Optical inspection method and its apparatus

Method for defect determination in fine concave-convex pattern and...

Scatterometry method and device for inspecting patterned medium

Disk surface inspection apparatus, inspection system thereof, and i...

Surface defect inspecting apparatus with defect detection optical s...

Method and device for detecting shape of surface of medium

Method and apparatus for detecting defects on a disk surface

Method and apparatus for measuring heterodyne optical interference...

Interference detecting system for use in interferometer

Patents Applicationslast 30 patents

MAGNETIC DISK INSPECTION DEVICE AND MAGNETIC DISK INSPECTION METHOD

OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEF...

SURFACE INSPECTING APPARATUS HAVING DOUBLE RECIPE PROCESSING FUNCTION

OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEF...

METHOD AND APPARATUS FOR INSPECTING SURFACE OF A SAMPLE

DISK SURFACE INSPECTION METHOD AND DISK SURFACE INSPECTION DEVICE

SUBSTRATE SURFACE DEFECT INSPECTION METHOD AND INSPECTION DEVICE

INSPECTION METHOD AND DEVICE FOR SAME

PATTERN INSPECTION METHOD AND DEVICE FOR SAME

OPTICAL INSPECTION METHOD AND ITS APPARATUS

PATTERN SHAPE INSPECTION INSTRUMENT AND PATTERN SHAPE INSPECTION ME...

METHOD FOR DEFECT DETERMINATION IN FINE CONCAVE-CONVEX PATTERN AND...

DISK SURFACE DEFECT INSPECTION METHOD AND APPARATUS

DISK SURFACE INSPECTION APPARATUS, INSPECTION SYSTEM THEREOF, AND I...

METHOD AND DEVICE FOR INSPECTING PATTERNED MEDIUM

METHOD AND DEVICE FOR DETECTING SHAPE OF SURFACE OF MEDIUM

SURFACE DEFECT INSPECTING APPARATUS WITH DEFECT DETECTION OPTICAL S...

METHOD AND APPARATUS FOR DETECTING DEFECTS ON A DISK SURFACE

METHOD AND APPARATUS FOR INSPECTING A SURFACE OF A SPECIMEN

OPTICAL SYSTEM OF DETECTING PERIPHERAL SURFACE DEFECT OF GLASS DISK...

DETECTION METHOD OF PERIPHERAL SURFACE DEFECT OF DISK AND DETECTION...

TESTING METHOD FOR SURFACE DEFECTS ON DISC AND TESTING APPARATUS FO...

MEASURING METHOD OF OPTICAL HETERODYNE INTERFERENCE AND A MEASURING...