Shigeru Tahara

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Auderghem, BE

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for performing post-etch annealing of a workpiece
- Patent number 10,319,905
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- David F. Hurley
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR PERFORMING POST-ETCH ANNEALING OF A WORKPIECE
- Publication number 20150214473
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- David F. Hurley
- H01 - BASIC ELECTRIC ELEMENTS