Shigeru Tanaka

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Patents Grantslast 30 patents

Information Patent Grant
Railway carrier apparatus for semiconductor wafers
- Patent number 4,903,610
- Issue date Feb 27, 1990
- Shinko Electric Co., Ltd.
- Takashi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dusttight storage cabinet apparatus for use in clean rooms
- Patent number 4,867,629
- Issue date Sep 19, 1989
- Shimizu Construction Co., Ltd.
- Yoshiyuki Iwasawa
- H01 - BASIC ELECTRIC ELEMENTS