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Shigeru Tanaka
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Ise, JP
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last 30 patents
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Patent Grant
Railway carrier apparatus for semiconductor wafers
Patent number
4,903,610
Issue date
Feb 27, 1990
Shinko Electric Co., Ltd.
Takashi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Dusttight storage cabinet apparatus for use in clean rooms
Patent number
4,867,629
Issue date
Sep 19, 1989
Shimizu Construction Co., Ltd.
Yoshiyuki Iwasawa
H01 - BASIC ELECTRIC ELEMENTS