Shigeru Wakayama

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic deflecting electrode unit for use in charged beam lit...
- Patent number 5,929,452
- Issue date Jul 27, 1999
- Kabushiki Kaisha Toshiba
- Shusuke Yoshitake
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of forming thin organic films
- Patent number 5,006,374
- Issue date Apr 9, 1991
- Kabushiki Kaisha Toshiba
- Shigeru Wakayama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus for forming organic thin film
- Patent number 4,987,851
- Issue date Jan 29, 1991
- Kabushiki Kaisha Toshiba
- Satoshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for forming thin organic film
- Patent number 4,848,270
- Issue date Jul 18, 1989
- Kabushiki Kaisha Toshiba
- Shigeru Wakayama
- B82 - NANO-TECHNOLOGY