Shigeru Wakiyama

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Actuator position calculation device, actuator position calculation...
- Patent number 9,766,267
- Issue date Sep 19, 2017
- Hitachi High-Tech Science Corporation
- Masatsugu Shigeno
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Probe aligning method for probe microscope and probe microscope ope...
- Patent number 8,495,759
- Issue date Jul 23, 2013
- SII NanoTechnology Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus structure and scanning probe microscope including apparat...
- Patent number 7,945,964
- Issue date May 17, 2011
- SII NanoTechnology Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing probe
- Patent number 7,378,654
- Issue date May 27, 2008
- SII NanoTechnology Inc.
- Shigeru Wakiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning probe microscope and scanning method
- Patent number 7,373,806
- Issue date May 20, 2008
- SII NanoTechnology Inc.
- Itaru Kitajima
- G01 - MEASURING TESTING
Information Patent Grant
Method of processing vertical cross-section using atomic force micr...
- Patent number 7,278,299
- Issue date Oct 9, 2007
- SII NanoTechnology Inc.
- Osamu Takaoka
- G01 - MEASURING TESTING
Information Patent Grant
Processing method using probe of scanning probe microscope
- Patent number 7,259,372
- Issue date Aug 21, 2007
- SII NanoTechnology Inc.
- Osamu Takaoka
- G01 - MEASURING TESTING
Information Patent Grant
Method of removing particle of photomask using atomic force microscope
- Patent number 7,232,995
- Issue date Jun 19, 2007
- SII NanoTechnology Inc.
- Osamu Takaoka
- G01 - MEASURING TESTING
Information Patent Grant
Surface analyzing apparatus
- Patent number 6,388,249
- Issue date May 14, 2002
- Seiko Instruments Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for analyzing minute foreign substance, and pr...
- Patent number 6,355,495
- Issue date Mar 12, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Naohiko Fujino
- G01 - MEASURING TESTING
Information Patent Grant
Surface analyzing apparatus
- Patent number 6,259,093
- Issue date Jul 10, 2001
- Seiko Instruments Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Analyzing method and apparatus for minute foreign substances, and m...
- Patent number 6,255,127
- Issue date Jul 3, 2001
- Seiko Instruments Inc.
- Naohiko Fujino
- G01 - MEASURING TESTING
Information Patent Grant
Surface analyzing apparatus with anti-vibration table
- Patent number 6,184,519
- Issue date Feb 6, 2001
- Seiko Instruments Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for analyzing minute foreign substance elements
- Patent number 6,124,142
- Issue date Sep 26, 2000
- Seiko Instruments, Inc.
- Naohiko Fujino
- G01 - MEASURING TESTING
Information Patent Grant
Analyzing method and apparatus for minute foreign substances, and m...
- Patent number 5,877,035
- Issue date Mar 2, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Naohiko Fujino
- G01 - MEASURING TESTING
Information Patent Grant
Probe microscope having error correction piezoelectric scanner
- Patent number 5,453,616
- Issue date Sep 26, 1995
- Seiko Instruments, Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Alignment assembly for aligning a spring element with a laser beam...
- Patent number 5,423,514
- Issue date Jun 13, 1995
- Seiko Instruments Inc.
- Shigeru Wakiyama
- G01 - MEASURING TESTING
Information Patent Grant
Tunnel current detecting photo-acoustic spectrometer
- Patent number 4,921,346
- Issue date May 1, 1990
- Agency of Industrial Science and Technology
- Hiroshi Tokumoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Relative displacement control apparatus
- Patent number 4,866,271
- Issue date Sep 12, 1989
- Agency of Industrial Science and Technology
- Masatoshi Ono
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Actuator Position Calculation Device, Actuator Position Calculation...
- Publication number 20140297222
- Publication date Oct 2, 2014
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Masatsugu Shigeno
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROBE ALIGNING METHOD FOR PROBE MICROSCOPE AND PROBE MICROSCOPE OPE...
- Publication number 20100031402
- Publication date Feb 4, 2010
- Shigeru Wakiyama
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS STRUCTURE AND SCANNING PROBE MICROSCOPE INCLUDING APPARAT...
- Publication number 20090255016
- Publication date Oct 8, 2009
- Shigeru Wakiyama
- G01 - MEASURING TESTING
Information Patent Application
Method of removing particle of photomask using atomic force microscope
- Publication number 20060022134
- Publication date Feb 2, 2006
- Osamu Takaoka
- G01 - MEASURING TESTING
Information Patent Application
Processing method using probe of scanning probe microscope
- Publication number 20050263700
- Publication date Dec 1, 2005
- Osamu Takaoka
- G01 - MEASURING TESTING
Information Patent Application
Method of processing vertical cross-section using atomic force micr...
- Publication number 20050262685
- Publication date Dec 1, 2005
- Osamu Takaoka
- G01 - MEASURING TESTING
Information Patent Application
Processing probe
- Publication number 20050199809
- Publication date Sep 15, 2005
- Shigeru Wakiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning probe microscope and scanning method
- Publication number 20050050947
- Publication date Mar 10, 2005
- Itaru Kitajima
- G01 - MEASURING TESTING
Information Patent Application
Electrochemical cell
- Publication number 20040209163
- Publication date Oct 21, 2004
- Shunji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for surface or cross-sectional processing and obs...
- Publication number 20040154744
- Publication date Aug 12, 2004
- Takashi Kaito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Surface analyzing apparatus
- Publication number 20010048076
- Publication date Dec 6, 2001
- Seiko Instruments Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY

Shigeru Wakiyama

Person

Patents Grantslast 30 patents

Actuator position calculation device, actuator position calculation...

Probe aligning method for probe microscope and probe microscope ope...

Apparatus structure and scanning probe microscope including apparat...

Processing probe

Scanning probe microscope and scanning method

Method of processing vertical cross-section using atomic force micr...

Processing method using probe of scanning probe microscope

Method of removing particle of photomask using atomic force microscope

Surface analyzing apparatus

Method and apparatus for analyzing minute foreign substance, and pr...

Surface analyzing apparatus

Analyzing method and apparatus for minute foreign substances, and m...

Surface analyzing apparatus with anti-vibration table

Method for analyzing minute foreign substance elements

Analyzing method and apparatus for minute foreign substances, and m...

Probe microscope having error correction piezoelectric scanner

Alignment assembly for aligning a spring element with a laser beam...

Tunnel current detecting photo-acoustic spectrometer

Relative displacement control apparatus

Patents Applicationslast 30 patents

Actuator Position Calculation Device, Actuator Position Calculation...

PROBE ALIGNING METHOD FOR PROBE MICROSCOPE AND PROBE MICROSCOPE OPE...

APPARATUS STRUCTURE AND SCANNING PROBE MICROSCOPE INCLUDING APPARAT...

Method of removing particle of photomask using atomic force microscope

Processing method using probe of scanning probe microscope

Method of processing vertical cross-section using atomic force micr...

Processing probe

Scanning probe microscope and scanning method

Electrochemical cell

Method and system for surface or cross-sectional processing and obs...

Surface analyzing apparatus