Shigeru Yamasaki

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Patents Grantslast 30 patents

Information Patent Grant
Staging apparatus and method, and method for manufacturing the stag...
- Patent number 6,272,763
- Issue date Aug 14, 2001
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,122,036
- Issue date Sep 19, 2000
- Nikon Corporation
- Shigeru Yamasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Staging apparatus and method, and method for manufacturing the stag...
- Patent number 5,983,513
- Issue date Nov 16, 1999
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Staging apparatus
- Patent number 5,832,620
- Issue date Nov 10, 1998
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Interferometric distance measuring apparatus utilizing an asymmetri...
- Patent number 5,561,524
- Issue date Oct 1, 1996
- Nikon Corporation
- Shigeru Yamasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Staging apparatus
- Patent number 5,502,899
- Issue date Apr 2, 1996
- Nikon Corporation
- Atsushi Yamaguchi
- G05 - CONTROLLING REGULATING