Shigeto TSURUTA

Person

  • Koshi City, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Measuring method and measuring device

    • Patent number 11,791,182
    • Issue date Oct 17, 2023
    • Tokyo Electron Limited
    • Yuji Mimura
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Coating apparatus and liquid surface detecting method

    • Patent number 9,649,655
    • Issue date May 16, 2017
    • Tokyo Electron Limited
    • Jun Yada
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Coating apparatus

    • Patent number 9,401,291
    • Issue date Jul 26, 2016
    • Tokyo Electron Limited
    • Yuji Mimura
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Coating apparatus and method for filling coating liquid

    • Patent number 9,238,245
    • Issue date Jan 19, 2016
    • Tokyo Electron Limited
    • Takayuki Ishii
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents