Shigetoshi HOSAKA

Person

Nirasaki -shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and processing system
- Patent number 9,266,146
- Issue date Feb 23, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method, pretreatment device, and processing system
- Patent number 8,865,590
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method, semiconductor manufactur...
- Patent number 8,008,184
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Baffle plate, apparatus for producing the same, method of producing...
- Patent number 7,648,610
- Issue date Jan 19, 2010
- Tokyo Electron Limited
- Taro Komiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilevel interconnection forming method for forming a semiconduct...
- Patent number 6,066,558
- Issue date May 23, 2000
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND PROCESSING SYSTEM
- Publication number 20130136859
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20120160833
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Ikuo SAWADA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FILM FORMING METHOD, PRETREATMENT DEVICE, AND PROCESSING SYSTEM
- Publication number 20120135612
- Publication date May 31, 2012
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR MANUFACTUR...
- Publication number 20100112806
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20070107845
- Publication date May 17, 2007
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system
- Publication number 20040238122
- Publication date Dec 2, 2004
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Baffle plate, apparatus for producing the same, method of producing...
- Publication number 20030094135
- Publication date May 22, 2003
- Taro Komiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shigetoshi HOSAKA

Person

Patents Grantslast 30 patents

Film forming method and processing system

Film forming method, pretreatment device, and processing system

Semiconductor device manufacturing method, semiconductor manufactur...

Baffle plate, apparatus for producing the same, method of producing...

Multilevel interconnection forming method for forming a semiconduct...

Patents Applicationslast 30 patents

FILM FORMING METHOD AND PROCESSING SYSTEM

HEAT TREATMENT APPARATUS

FILM FORMING METHOD, PRETREATMENT DEVICE, AND PROCESSING SYSTEM

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR MANUFACTUR...

SEMICONDUCTOR PROCESSING SYSTEM

Semiconductor processing system

Baffle plate, apparatus for producing the same, method of producing...