Shigetoshi Kimura

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Nirasaki-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus
- Publication number 20060037702
- Publication date Feb 23, 2006
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Upper electrode and plasma processing apparatus
- Publication number 20050000442
- Publication date Jan 6, 2005
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...