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Shigeyoshi Netsu
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Fukushima, JP
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Patents Grants
last 30 patents
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Patent Grant
Wafer manufacturing method, polishing apparatus, and wafer
Patent number
7,582,221
Issue date
Sep 1, 2009
Shin-Etsu Handotai Co., Ltd.
Shigeyoshi Netsu
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor wafer and device for semiconductor device manufacturi...
Patent number
6,787,797
Issue date
Sep 7, 2004
Shin-Etsu Handotai Co., Ltd.
Kiyoshi Demizu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
WAFER MANUFACTURING METHOD, POLISHING APPARATUS, AND WAFER
Publication number
20090057840
Publication date
Mar 5, 2009
Shin-Etsu Handotai Co., Ltd.
Shigeyoshi Netsu
B24 - GRINDING POLISHING
Information
Patent Application
Wafer manufacturing method, polishing apparatus , and wafer
Publication number
20030022495
Publication date
Jan 30, 2003
Shigeyoshi Netsu
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor wafer and device for semiconductor device manufacturi...
Publication number
20020167006
Publication date
Nov 14, 2002
Kiyoshi Demizu
H01 - BASIC ELECTRIC ELEMENTS